为了提高激光光斑中心的定位精度, 实现激光稳定输出的功能, 提出了基于四象限探测器的激光稳定集成化系统。首先, 根据四象限探测器的工作原理, 对四象限探测器上光斑的中心位置和偏差量进行理论计算和分析, 然后融合计算机信号处理技术和控制技术对四象限探测器信号进行闭环控制, 并将四象限探测器和光学元器件集成在多轴笼式结构中, 完成了激光稳定集成化系统设计。多次实验数据结果表明: 该系统能100%完成对光斑中心的定位, 稳定性达到94.74%, 3次实验误差的差值最大为2.422 μm。

In order to improve the positioning accuracy of the laser spot center and realize the function of laser stabilization output, this paper proposes the laser stabilization integrated system based on four-quadrant detector. First, according to the working principle of the four-quadrant detector, theoretical calculates and analyzes the center position and deviation of spot on the four quadrant detector, then, combines the computer signal processing technology and control technology, closed-loop control of the four-quadrant detector signal acquisition device and integration of the four-quadrant detector and optical components in a multi-axis cage structure, completed the design of the laser stabilization integrated system. experimental data result for many times show that the system can 100% complete the positioning of the spot center and the stability can reach 94.74%, the maximum difference of the experimental error is 2.422 μm.