激光与光电子学进展, 2023, 60 (3): 0312014, 网络出版: 2023-02-14
高精度光谱共焦位移测量技术研究进展 下载: 1214次特邀综述
Research Progress of High Precision Chromatic Confocal Displacement Measurement Technology
仪器,测量与计量 位移测量 光谱共焦技术 宽谱光源 色散物镜 共轭小孔 instruments, measurement and metrology displacement measurement chromatic confocal technology broadband light source dispersion objective conjugate pinhole
摘要
随着我国先进制造业的快速发展,光谱共焦位移测量技术以其精度高、适应性强、效率高等优势而得到广泛关注,被应用于诸多行业。本文首先介绍了光谱共焦技术的应用进展,对其在表面形貌及工件厚度测量方面的研究成果进行分析,从多个方面说明了光谱共焦技术在位移测量过程中的性能特点。其次,针对光谱共焦技术的关键组成阐述了其研究进展情况,包括宽谱光源、色散物镜、共轭小孔以及光谱检测与处理等方面的主要成果,展示了各种创新思想在光谱共焦技术中的具体实现,并对各种技术方案进行对比分析,梳理了光谱共焦仪器的技术特点及优缺点。最后,对光谱共焦位移测量技术存在的技术问题进行了总结和展望,以期为光谱共焦技术的性能提升和应用拓展提供有益参考。
Abstract
With the rapid development of the advanced manufacturing industry, the chromatic confocal displacement measurement technology has attracted great attention due to its advantages of high precision, strong adaptability, and high efficiency. It has been widely used in many industries. This paper firstly introduces the application progress of chromatic confocal technology, analyzes some researches in surface topography and workpiece thickness measurement, and explains the performance characteristics of chromatic confocal technology in displacement measurement in many aspects. Secondly, this paper details the key components of chromatic confocal technology, including broad-band light source, dispersive objective, conjugate pinhole, and spectral detection and processing, and demonstrates various innovative ideas in the chromatic confocal technology. These specific implementation technical solutions are broadly compared and analyzed, including the technical characteristics, advantages and disadvantages. Finally, this paper summarizes and prospects the existing technical problems of chromatic confocal displacement measurement technology, in order to provide references for the performance improvement and application expansion of the chromatic confocal technology.
白蛟, 李婧雯, 王晓浩, 李星辉. 高精度光谱共焦位移测量技术研究进展[J]. 激光与光电子学进展, 2023, 60(3): 0312014. Jiao Bai, Jingwen Li, Xiaohao Wang, Xinghui Li. Research Progress of High Precision Chromatic Confocal Displacement Measurement Technology[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312014.