中国激光, 2019, 46 (11): 1102010, 网络出版: 2019-11-09
皮秒贝塞尔光束切割化学强化玻璃 下载: 2177次封面文章
Chemically Strengthened Glass Fabricated by Picosecond Bessel Beam Cutting
激光光学 化学强化玻璃 皮秒激光 贝塞尔光束 玻璃切割 laser optics chemically strengthened glass picosecond laser Bessel beam glass cutting
摘要
化学强化玻璃被广泛应用于电子产品屏幕,但很难被切割加工。利用皮秒激光高峰值功率、超短脉冲及贝塞尔光束长焦深的特点,在化学强化玻璃内加工出一个狭长的改性截面,利用强化玻璃本身的应力与皮秒激光诱导的应力,使强化玻璃精准地沿着改性截面自动断开,并获得了切割速度高达400 mm/s,切割面粗糙度为395 nm的切割分离效果。实验结果表明,影响切割速度和质量的主要参数是单脉冲能量和脉冲改性间距。
Abstract
Chemically strengthened glass is widely used in electronic device display screens; however, they are difficult to cut. With the high peak power of a picosecond laser and long focal depth of a Bessel beam, a narrow-modified plane is machined inside the chemical glass. Owing to its original stress and stress induced by the picosecond laser, chemically strengthened glass accurately self-breaks along the modified plane with cutting speed of 400 mm/s and surface roughness of 395 nm. Experimental results show that pulse energy and pulse modification spacing are the main parameters affecting cutting speed and quality.
杨泽齐, 段军, 陈航, 刘朋, 陈乔丹, 徐新科. 皮秒贝塞尔光束切割化学强化玻璃[J]. 中国激光, 2019, 46(11): 1102010. Zeqi Yang, Jun Duan, Hang Chen, Peng Liu, Qiaodan Chen, Xinke Xu. Chemically Strengthened Glass Fabricated by Picosecond Bessel Beam Cutting[J]. Chinese Journal of Lasers, 2019, 46(11): 1102010.