激光与光电子学进展, 2011, 48 (5): 051402, 网络出版: 2011-05-09
飞秒激光直写太赫兹波段二维金属亚波长孔阵列
Femtosecond Laser Directly Writing Two Dimensional Metal Sub-wavelength Hole Array Applicable to Terahertz Band
激光技术 飞秒激光微纳加工 打孔 二维金属亚波长孔阵列 laser technique femtosecond laser micromachining drilling two dimensional mental sub-wavelength hole array
摘要
利用中心波长为775 nm、重复频率为1 kHz、脉宽为130 fs的飞秒激光脉冲对厚度为200 μm的铜片进行微加工,制作了适用于太赫兹(THz)波段(0.1~4 THz)的二维金属亚波长孔阵列。实验中,分别固定激光能量和加工时间,研究烧蚀孔直径随激光功率及加工时间的变化规律,发现激光偏振态是引起烧蚀缺口的主要原因。利用数值模拟软件(CST)计算出适用于THz波段的金属孔阵列结构参数,根据以上实验结果选择合适的激光参数制作了孔阵列。
Abstract
Two dimensional metal sub-wavelength hole array applicable to THz band (0.1~4 THz) has been made by using femtosecond laser pulses at 775 nm centre wavelength, 1 kHz repetition rate and 130 fs pulse width micromachining copper sheets with thickness up to 300 μm. The diameters of processed hole have been measured as a function of the laser power and the processing time while the processing time and the laser power are fixed respectively. The polarization of the laser radiation is the main cause of the ablation gaps. By using numerical computer simulation technology (CST), the suitable metal hole array structure parameters applicable to THz band have been calculated. According to the above experimental results, the appropriate laser parameters have been chosen to fabricate the hole array.
汪月容, 李毅, 何书通, 毛鹏程, 胡明列. 飞秒激光直写太赫兹波段二维金属亚波长孔阵列[J]. 激光与光电子学进展, 2011, 48(5): 051402. Wang Yuerong, Li Yi, He Shutong, Mao Pengcheng, Hu Minglie. Femtosecond Laser Directly Writing Two Dimensional Metal Sub-wavelength Hole Array Applicable to Terahertz Band[J]. Laser & Optoelectronics Progress, 2011, 48(5): 051402.