针对当前压电驱动悬臂梁谐振器存在加工工艺复杂、成本较高的问题，该文提出了一种基于氮化铝支撑层的新型压电驱动悬臂梁层叠结构，它不仅能有效降低加工难度，还能在实现器件小型化的同时保持较高的品质因数。该文通过理论分析研究了固定频率下谐振器品质因数与器件尺寸设计的关系，并对比了不同支撑层材料对谐振器品质因数的影响。通过实验研究了电极尺寸设计对谐振器在真空中性能的影响，从而确定了工作在面外弯曲振动模式的压电驱动氮化铝基悬臂梁谐振器的最优设计。测试结果表明，在电极宽度占比为1，长度占比为2/3时，该谐振器表现出最好的性能，其品质因数为7 786，谐振频率为63.44 kHz，运动阻抗为66.70 kΩ。

In response to the problems of complex processing technique and high cost in the existing piezoelectric-actuated cantilever resonators, this paper proposes a new piezoelectric-actuated cantilever resonator stack structure based on an aluminum nitride support layer, which not only effectively reduces the processing difficulty, but also maintains a high quality factor while miniaturizing the device. The relationship between resonator quality factor and device size design at a fixed frequency is investigated through theoretical analysis, and the effects of different support layer materials on the resonator quality factor are compared. The effect of electrode size design on the performance of resonator in vacuum is investigated experimentally, and the optimum design of piezoelectric-actuated aluminum nitride based cantilever resonator operating in out-of-plane flexural vibration mode is determined. The test results show that the resonator exhibits the best performance when the electrode width ratio is 1 and the length ratio is 2/3, with the quality factor of 7 786, the corresponding resonant frequency of 63.44 kHz, and motion impedance of 66.70 kΩ.