光学 精密工程, 2023, 31 (21): 3096, 网络出版: 2024-01-05  

数字微镜器件光谱成像技术进展

Progress in spectral imaging technology of digital micromirror devices
石颖超 1,2张路明 1,2陈飞 1,2苑伟政 1,2虞益挺 1,2,*
作者单位
1 西北工业大学 宁波研究院 机电学院, 陕西西安70072
2 西北工业大学 空天微纳系统教育部重点实验室 陕西省微纳机电系统重点实验室, 陕西西安71007
摘要
数字微镜器件(DMD)作为一种灵活、可编程、可独立寻址的空间光调制器件,广泛地应用于无掩膜光刻、光束整形、全息成像、共焦测量等领域。在光谱成像领域,DMD能够对成像视场进行精细可控的调制,从而代替传统的机械掩膜版和机械扫描结构。综述了近年来DMD在光谱成像领域的研究进展和应用情况,详细论述了基于DMD的编码孔径和推扫式光谱成像系统的光学系统基本结构及工作原理;梳理了基于DMD的光谱成像系统从哈达玛变换光谱成像到推扫式光谱成像的发展脉络;详细介绍了研究人员为克服DMD微镜的衍射以及像面倾斜等像差所做的相关研究工作。最后,总结了基于DMD的光谱成像技术的独特优势,讨论了基于DMD的光谱成像技术未来的发展方向与应用前景。
Abstract
In recent years, digital micromirror device (DMD), as a flexible, programmable, and independently addressable spatial light modulation device, has been widely used in maskless lithography, beam shaping, holographic imaging, confocal measurement, and other fields. The flexible modulation mode also gives DMD unique advantages in spectral imaging. It can flexibly modulate the imaging field of view, replacing the traditional mechanical mask and scanning structure. In this study, DMD's research progress and application in spectral imaging in recent years was reviewed. The basic structure and working principle of the optical system of the aperture-coded and push-broom spectral imaging system based on DMD were discussed in detail and the development of a spectral imaging system based on DMD from Hadamard transform spectral imaging to push-broom spectral imaging was summarized. The relevant research work to overcome the DMD's diffraction owing to the micro-mirror and inclination of the image plane was introduced. Finally, The unique advantages of spectral imaging technology based on DMD was summarized and the future development direction and application prospect of spectral imaging technology based on DMD was discussed .

石颖超, 张路明, 陈飞, 苑伟政, 虞益挺. 数字微镜器件光谱成像技术进展[J]. 光学 精密工程, 2023, 31(21): 3096. Yingchao SHI, Luming ZHANG, Fei CHEN, Weizheng YUAN, Yiting YU. Progress in spectral imaging technology of digital micromirror devices[J]. Optics and Precision Engineering, 2023, 31(21): 3096.

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