该文提出了一种单轴微机电系统(MEMS)热膨胀流陀螺的基本结构, 并揭示了其敏感机理。通过有限元法, 利用COMSOL Multiphysics建立了陀螺的三维模型, 在有无角速度时对陀螺敏感元件的温度场和等温线变化情况进行计算。结果表明, 单轴MEMS热膨胀流陀螺具有陀螺效应, 输入角速度为［-1 080 (°)/s,1 080 (°)/s］, 陀螺的结构灵敏度为0.053 9 K/［(°)·s-1］, 非线性度为14.13%。

The basic structure of a single-axis MEMS thermal expansion flow gyro has been proposed, and its sensitive mechanism has been revealed in this paper. The three-dimensional model of the gyro was established by the finite element method using COMSOL Multiphysics, and the changes of temperature field and isotherm of the sensitive element of the gyro were calculated with and without angular velocity. The calculation results show that the single-axis MEMS thermal expansion flow gyro has the gyroscopic effect, and the structural sensitivity of the gyro is 0.053 9 K/［(°)·s-1］with a nonlinearity of 14.13% for the input angular velocity in the range of ［-1 080 (°)/s,1 080 (°)/s］.