高分子薄膜通常具有结晶、相分离等微尺度结构，同时在制备和加工过程中也会形成表面缺陷、气泡等不均匀结构，这些都会严重影响其性能。然而，表征这些结构目前还没有很好的方法。本文探究了数字全息显微镜（Digital Holographic Microscopy，DHM）这一原位、无损、高精度的光学三维显微技术在高分子薄膜表面及内部结构、缺陷表征中的应用。利用自建的DHM和三维连续定位算法对100 nm聚苯乙烯纳米颗粒在液相薄层中的分布、晶圆涂覆聚氨酯后表面的形貌、聚甲基丙烯酸酯薄膜与水的相分离过程、聚乙二醇薄膜干燥过程中的边缘结晶、聚乙烯醇薄膜内的微纳气泡进行了表征，证明DHM具有很高的成像分辨率，能够对高分子薄膜的表面和内部同时实现高精度的原位三维缺陷监测与结构表征，具有独特的优势和应用前景。

The defects and heterogenous structures which are far beyond the molecular scale always exist on the film surfaces or inside the films, such as surface defects, phase separation, crystallization, microbubbles and other impurity particles, resulting in the significant decline of their performance. Until now, in-situ characterization of these defects and structures is still challenging. Herein, we explore the applications of the digital holographic microscope (DHM)??, an in-situ, nondestructive and high-precision optical 3D imaging technique, in the 3D characterizations of both the surface and internal defects of polymer films. Examples include 3D distribution characterization of 100 nm polystyrene nanoparticles in a thin liquid layer, morphology of the surface of the polyurethane coated wafer, phase separation process of polymethacrylate film from water, edge crystallization monitoring during the drying of polyethylene glycol film, and characterization of micro-nano bubbles in the polyvinyl alcohol film. Obviously, DHM has unique advantages and is promising for future applications in polymer film characterization.