针对定性分析方法无法彻底避免鬼像影响检测的现象, 在理论分析的基础之上, 提出补偿器鬼像定量仿真分析方法。借助光学分析软件, 在设计阶段彻底避免鬼像影响检测, 并结合实例, 说明定性分析方法的局限性, 验证定量仿真分析方法的有效性。该分析方法为补偿器的设计分析提供定量分析方法, 提高了补偿器研制的成品率, 提高了补偿检验精度, 对高精度补偿检验技术具有重要意义。

Qualitative analysis methods can not completely avoid the effect from the ghost of compensator, thus a quantitative simulation analysis is proposed based on the theoretical analysis. Optical analysis software in the design stage is used to completely rule out the effect from the ghost. An example is addressed to illustrate the limitations of qualitative analysis methods, and to verify the validity of quantitative simulation analysis. This simulation provides a quantitative analysis method for the compensator design and analysis to improve the yield of compensator developed and the accuracy of testing, which is important for high-precision inspection techniques.