光学学报, 2020, 40 (8): 0805001, 网络出版: 2020-04-13
基于复合带宽积分平均衍射效率的倾斜误差研究 下载: 895次
Tilt Error Based on Comprehensive Bandwidth Integral Average Diffraction Efficiency
衍射光学 衍射效率 倾斜误差 斜入射 多层衍射光学元件 diffractive optics diffraction efficiency tilt error oblique incidence multilayer diffractive optical elements
摘要
在系统装调过程中引入的倾斜误差会影响衍射光学元件(DOEs)的衍射效率。入射角度的增大也会影响DOEs的衍射效率。基于多层衍射光学元件(MLDOEs)的相位延迟表达式,提出了斜入射时衍射效率和带宽积分平均衍射效率(BIADE)与倾斜误差的理论关系模型。分析了斜入射时倾斜误差对衍射效率和BIADE的影响。建立了工作在一定入射角度范围内的复合BIADE与倾斜误差的关系。当工作在8~12 μm波段的MLDOEs的入射角度范围为0°~20°时,若要实现98%的复合BIADE,倾斜误差角度应控制在0.25°范围内。进一步分析了存在偏心误差和相对微结构高度误差等其他误差因素时,要达到一定的复合BIADE,所需对应的倾斜误差大小。该方法和结论可以用于指导混合光学系统中MLDOEs的设计与装调。
Abstract
The tilt error introduced in the system assembling process affects the diffraction efficiency of diffractive optical elements (DOEs). An increase in the incident angle also affects the diffraction efficiency of DOEs. Based on the phase delay expression of multilayer DOEs (MLDOEs), this paper proposes a theoretical model of the relationship between the diffraction efficiency/bandwidth integrated average diffraction efficiency (BIADE) and the tilt error. The effect of the tilt error on the diffraction efficiency/BIADE at oblique incidence is analyzed. The relationship between the comprehensive BIADE working within a certain incidence angle and the tilt error is established. When the range of incident angle for the MLDOEs, operating within the 8--12-μm infrared waveband, is 0°--20°, if the comprehensive BIADE is required to be higher than 98%, the tilt error should be less than 0.25°. When there are other errors, such as the decenter error and the microstructure height error, the tilt error is further analyzed to reach the required comprehensive BIADE. The method and conclusions can be used to assist in designing and assembling the MLDOEs in hybrid optical systems.
杨亮亮, 刘成林, 陆法林, 童巧英, 赵勇兵, 郭仁甲. 基于复合带宽积分平均衍射效率的倾斜误差研究[J]. 光学学报, 2020, 40(8): 0805001. Liangliang Yang, Chenglin Liu, Falin Lu, Qiaoying Tong, Yongbing Zhao, Renjia Guo. Tilt Error Based on Comprehensive Bandwidth Integral Average Diffraction Efficiency[J]. Acta Optica Sinica, 2020, 40(8): 0805001.