为提高微机电系统(MEMS)中光学系统整体仿真的准确性和效率,解决光学组件系统级建模存在的问题，提出了一种光学组件系统级建模方法，该方法可同时支持与MEMS系统级机械组件和电路组件共同仿真。首先，介绍了多端口组件网络方法、高斯光束特点和空间坐标系变换理论。接着，以微平面镜为例，介绍了光学组件系统级建模方法的流程。最后，采用Verilog-A硬件描述语言建立了包含多个典型光学组件的系统级光学库。使用该库的光学组件在MEMS集成设计工具MEMS Garden中搭建微扫描系统进行了仿真与测试。与商业软件CoventorWare的分析结果相比，提出的建模方法解决了扫描盲区问题，且非差分电压分析的误差小于3%。结果显示，本文提出的建模方法精确有效，对MEMS的系统级设计有参考价值。

To improve the accuracy and efficiency of the simulation for the optical system in a Micro-electro-mechanical System (MEMS) and to overcome the difficulties in the system-level modeling of MEMS optical components, a system-level modeling method was proposed to support the co-simulation for MEMS system-level mechanical components and electrical components. First, the modeling methodology of Multi-Port-Element Network (MuPEN), the characteristics of Gaussian beam and the theory of space coordinate transformation were introduced. Then, the modeling process of a micro-mirror was given to explain the modeling method of all optical components. Finally, using the hardware description language of Verilog-A, an optical library including some typical components was established. The non-differential voltage simulation results of the system-level scanning system were compared with those of CoventorWare and results show that the scanning system in former environment can eliminate the blind area, and the maximum error is within 3%. It indicates that the proposed modeling method for optical components could work effectively and accurately, and the study is significant value to the MEMS system-level design.