硅基光子集成谐振腔作为光学敏感单元对芯片级光学陀螺的性能起着至关重要的作用。以互易敏感增强型双微环架构的光子集成陀螺谐振腔为研究对象，通过时域有限差分法仿真分析了双微环谐振腔的关键结构参数，并通过搭建仿真链路研究了微环谐振腔的品质因子、精细度与耦合系数、传输损耗的内在关系。在此基础上，选取典型结构参数设计版图，基于无源硅基光子集成工艺的多项目晶圆流片制备了双微环谐振腔器件。测试结果表明，当微环半径为500 μm、波导与微环的耦合系数为0.3时，在工作波长1550 nm附近微环的自由光谱范围为0.182 nm，3 dB带宽为0.045 nm，精细度为4.04，品质因子约为3.4×104。本研究结果为双微环谐振腔的进一步优化设计提供了依据。

As an optically sensitive unit, the silicon-based integrated photonic resonator plays a vital role in the performance of chip-scale optical gyroscopes. In this paper, the integrated resonator of the photonic integrated gyroscope with the enhanced reciprocity-sensitive dual micro-ring architecture is the research object. The key structural parameters of the dual microring resonator are analyzed through finite-difference time-domain simulation. Constructing a simulation link allowed the study on the internal relationships between quality factor, fineness, coupling coefficient, and transmission loss. The resulting insights formed the basis for structural layout design. The dual microring resonant cavity device is then fabricated through a multiproject wafer tape-out using a passive silicon-based photonic integration process. Test results show that, for a microring radius of 500μm, the coupling coefficient between waveguide and microring is 0.3, the working wavelength is around 1550 nm, the free spectral range is 0.182 nm, the 3 dB bandwidth is 0.045 nm, the fineness is 4.04, and the quality factor is ~3.4×104. These research results provide a firm foundation for further design optimization of the dual microring resonator.