光学学报, 2020, 40 (17): 1705001, 网络出版: 2020-08-26
大角度倾斜照明条件下的PIE迭代重建算法研究 下载: 998次
Reconstruction Algorithm for Ptychographic Iterative Engine with Highly Tilted Illumination
衍射 相干衍射成像 相位测量 光学传递函数 diffraction coherent diffractive imaging phase measurement optical transfer function
摘要
提出一种大倾角照明条件下的高精度PIE(ptychographic iterative engine)迭代重建算法。该算法用小角度照明的透射光代替大角度照明的透射光,通过修正角谱传递函数,得到适应大角度迭代的光场传输公式。在非傍轴条件下,该算法能够避免样品面上相位分布欠采样的问题,同时精确计算衍射面上的衍射光斑,为单次曝光PIE成像的进一步发展和实际应用解决了最为关键的技术难题。
Abstract
A high-precision reconstruction algorithm is proposed for ptychographic iterative engine (PIE) with highly tilted illumination. By replacing the highly tilted illumination with exiting light field of vertical illumination and modifying the optical transfer function in free space, a computing formula suitable for calculating the large-angle light propagation is obtained together with the corresponding iterative reconstruction algorithm. This proposed method successfully avoids the under-sampling of steep phase ramp of light beam on a sample plane while ensuring the computing accuracy for the diffraction intensity of the non-paraxial light beam on recording plane, overcoming the most significant technique problem that hinders the further improvement in reconstruction accuracy and the applications of single-shot PIE in various research fields.
昌成成, 潘兴臣, 陶华, 刘诚, 朱健强. 大角度倾斜照明条件下的PIE迭代重建算法研究[J]. 光学学报, 2020, 40(17): 1705001. Chengcheng Chang, Xingchen Pan, Hua Tao, Cheng Liu, Jianqiang Zhu. Reconstruction Algorithm for Ptychographic Iterative Engine with Highly Tilted Illumination[J]. Acta Optica Sinica, 2020, 40(17): 1705001.