中国光学, 2014, 7 (2): 287, 网络出版: 2014-03-31   

碳化硅凸非球面反射镜的加工与检测

Fabrication and test of SiC convex aspheric mirror
作者单位
中国科学院 长春光学精密机械与物理研究所光学系统先进制造技术中国科学院重点实验室,吉林 长春 130033
摘要
为了满足凸非球面反射镜加工中的全频段质量控制及光学参数的高精度检验,提出了应用双摆轴极坐标快速非球面加工技术及测杆法控制Hindle法检测光学参数。首先,描述了双摆轴极坐标快速非球面加工技术及设备;然后,介绍了应用测杆法控制Hindle检测法中标准球面镜顶点分别与被检非球面镜顶点及其焦点的光学间隔,并对其控制精度进行了分析;最后,针对Φ158mm的凸非球面,给出了双摆轴加工的检验结果,并对检测精度进行了分析。实验结果表明:应用双摆轴加工工艺在使低频误差快速收敛的同时,可以有效抑制中频误差,其低频误差的控制精度可以稳定地达到λ/30(λ=633 nm);应用测杆装调Hindle检测光路的控制极限误差为±0065 mm,两个光学间隔参数的公差分别为±022 mm和±030 mm。应用双摆轴加工技术实现了凸非球面的快速加工与全频段质量控制,采用Hindle检测凸非球面得到面形精度为0022λ(RMS,@633 nm),满足光学设计技术指标要求。
Abstract
In order to satisfy all-frequency error quality controlling and high-precision test during the process of the convex asphere, double laps with polar coordinate polishing technique and the measuring poles method used for the alignment of Hindle test are proposed. Firstly, the double laps with polar coordinate polishing technique for manufacturing the aspheric mirror and the numerical control machine for processing aspheric surface are presented. Then, the measuring poles method used to control the distances between vertex of the standard sphere and the vertex and focus of the tested asphere is introduced, and the controlling precision is analyzed. Finally, for a convex asphere with the aperture of Φ158 mm, the test results and precision of the Hindle test are described. The results indicate that the double laps polishing technique can make the low-frequency surface error convergence quickly, and the mid-frequency surface error is restrained at the same time. The controlling precision of the low-frequency surface error is about λ/30(λ=633 nm). The limit error using the measuring poles to control the distance is ±0065 mm, and the tolerances of the two space parameters are ±022 mm and ±030 mm, respectively. The fast manufacture and all-frequency controlling of the convex asphere are realized by the double laps with polar coordinate polishing technique, and the test result of low-frequency surface error is 0022λ(RMS,@633 nm) in the Hindle test, which satisfies the specification requirements of the optical design.

李俊峰. 碳化硅凸非球面反射镜的加工与检测[J]. 中国光学, 2014, 7(2): 287. LI Jun-feng. Fabrication and test of SiC convex aspheric mirror[J]. Chinese Optics, 2014, 7(2): 287.

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