微空心阴极放电是一种新颖的、非平衡、高气压辉光放电.综述了微空心阴极放电的基本原理;详细论述了微空心阴极放电中的准分子辐射,以及微空心阴极放电的放电方式(直流放电、脉冲放电、射频放电)对准分子辐射强度和效率的影响;最后论述了微空心阴极放电的运行方式(串联运行、并联运行)对准分子辐射的影响.

Microhollow cathode discharge (MHCD) is a novel, nonequilibrium, high-pressure, direct current glow discharge. An overview of the research progress on the foundational theory of the MHCD was presented. The excimer radiation from the MHCD is discussed in particular, and then discharge mode (dc discharge, pulse dc discharge, RF discharge) effect to the intensity and the efficiency of excimer radiation is elucidated. The operation way (operation in series, operation in parallel) of the MHCD effect to excimer radiation is also discussed finally.