微颗粒操控技术以其控制精确,成本低及简洁高效的特点, 在生物医学工程和微纳米器件制造领域有广阔的应用前景。传统操控方法对无磁性、无导电性及大密度固体微颗粒的操控存在不足。因此, 该文提出一种基于压电悬臂梁低频振动的微颗粒操控系统, 利用流场底部流动实现微颗粒的聚集。聚集显微实验表明, 压电振子的低频振动激发流场底部流动, 使培养皿底部的球型氧化铝颗粒向目标区域移动和聚集, 并在122 s时达到稳定状态。对试验结果进行图像处理, 结果表明, 微颗粒稳定聚集后的聚集面积为79 405 μm2。该操控方法可实现大密度微颗粒的聚集, 且聚集范围大, 可为微纳器件制造提供参考。

The micro-particle manipulation technology, with its precise control, low cost, simplicity and high efficiency, has broad application prospects in biomedical engineering and micro-nano device manufacturing. The traditional control methods have shortcomings in the control of non-magnetic, non-conductive and high-density solid micro-particles. Therefore, this paper proposes a micro-particle manipulation system based on the low-frequency vibration of piezoelectric cantilever beam, which uses the flow at the bottom of the flow field to realize the aggregation of micro-particles. The aggregation microscopic test shows that the spherical alumina particles at the bottom of the culture dish move and aggregate towards the target region due to the bottom flow field excited by low-frequency vibration of piezoelectric vibrator, and reach a stable state at 122 s. The image processing of test results show that the aggregation area of the micro-particles is up to 79 405 μm2. The proposed manipulation method can realize the aggregation of high-density micro-particles and the aggregation range is large, which can provide a technical reference for the manufacturing of micro-nano devices.