中国激光, 1995, 22 (1): 9, 网络出版: 2007-08-17
高效铜激光倍频及在光刻中的应用
High-efficiency Second-harmonic Generation of a Copper Vapor Laser in BBO and its Application in Photolithography
摘要
通过线聚焦将自滤波振荡行波放大后的铜激光在BBO晶体中信频,当基频光功率为5.4 W时,倍频效率达14.4%。用钢激光倍频光进行接触式光刻,刻线分辨率优于1.0 μm。
Abstract
A second-harmonic of a copper vapor laser whichis output from an oscillatoramplifer system with a self-fliering unstable resonator is generated in BBO crystal by a line focus. The conversion efficiency reached 14.4% at 5.4 W fundamental power. A pattern of 1.0 μm lines and spases is resolved by contact photolithography on 255.3 urn line for the first time.
任虹, 梁培辉, 路郭武, 叶韧, 崔自强. 高效铜激光倍频及在光刻中的应用[J]. 中国激光, 1995, 22(1): 9. 任虹, 梁培辉, 路郭武, 叶韧, 崔自强. High-efficiency Second-harmonic Generation of a Copper Vapor Laser in BBO and its Application in Photolithography[J]. Chinese Journal of Lasers, 1995, 22(1): 9.
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