激光与光电子学进展, 2017, 54 (6): 061202, 网络出版: 2017-06-08
白光干涉轮廓仪空间扫描范围自适应规划方法
Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler
测量 光学无损检测 干涉条纹识别 ViBe算法 白光干涉轮廓仪 空间扫描范围设定 measurement optical non-destructive detection interference fringe identification ViBe algorithm white light interferometric profiler spatial scanning range setting
摘要
为提高白光干涉轮廓仪的测试效率,提出了一种空间扫描范围自适应规划方法。构建了相应的测试系统,选择能量梯度函数用于系统最佳干涉位置的定位。使用ViBe算法对最佳干涉位置处电荷耦合元件(CCD)图像中的干涉条纹进行提取,并对提取结果进行二值化处理。实验结果表明,该方法能够准确识别扫描上下限位置。
Abstract
In order to improve the measurement efficiency of white light interferometric profilers, one new adaptive planning method of spatial scanning range is proposed. The corresponding measurement system is built and the energy gradient function is chosen to locate the optimal interference position. The interference fringes of charge coupled device (CCD) images at the optimal interference positions are extracted with the ViBe algorithm, and then the extraction results are processed by the binaryzation. The experimental results show that the proposed method can accurately identify the positions of the function upper and lower limits.
马龙, 吕毅, 裴昕, 焦智超, 张鸿燕, 胡艳敏. 白光干涉轮廓仪空间扫描范围自适应规划方法[J]. 激光与光电子学进展, 2017, 54(6): 061202. Ma Long, Lü Yi, Pei Xin, Jiao Zhichao, Zhang Hongyan, Hu Yanmin. Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler[J]. Laser & Optoelectronics Progress, 2017, 54(6): 061202.