软X射线共振反射方法表征Sc/Si多层膜界面化合物成分的计算研究
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朱圣明, 李淼. 软X射线共振反射方法表征Sc/Si多层膜界面化合物成分的计算研究[J]. 光学仪器, 2017, 39(4): 90. ZHU Shengming, LI Miao. Characterization of interlayer composition in Sc/Si multilayers by soft X-ray resonant reflectivity method[J]. Optical Instruments, 2017, 39(4): 90.
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