遗传算法在薄膜特性参量测量中的应用
[1] LAAZIZA Y,BENNOUNA A,CHADBOURN N.Optical characterization of low optical thickness thin films from transmittance and back reflectance measurements[J].Thin Solid Films,2000,372(5):149-155.
[2] TANG Jin-fa,GU Pei-fu.Thin film optical and technology[M].Hangzhou:China Machine Press,1987:13-41.唐晋发,顾培夫.薄膜光学与技术[M].杭州:机械工业出版社,1987:13-41.
[3] CHEN Yan-ping,LIU Yu-ling,LIU Peng,et al.Determining thin film thickness characterization using adaptive simulated annealing algorithm[C].SPIE,2006,6024:16.
[4] L1U Peng,LIU Yu-ling,YU Fei-hong,et al.Thin film thickness determination using adaptive simulated annealing[J].OptoElectronic Engineering,2005,32(6):93-96.刘鹏,刘玉玲,余飞鸿,等,自适应模拟退火结合共轭梯度法求解薄膜厚度[J].光电工程,2005,32(6):93-96.
宫兴致, 陈燕平, 刘玉玲, 余飞鸿. 遗传算法在薄膜特性参量测量中的应用[J]. 光子学报, 2007, 36(11): 2053. 宫兴致, 陈燕平, 刘玉玲, 余飞鸿. The Application of Genetic Algorithm in Thin Film Characters Measurement[J]. ACTA PHOTONICA SINICA, 2007, 36(11): 2053.