TFT-LCD行业显影液参数对半色调光刻胶膜厚的影响
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陈国, 韩亚军, 于洪禄, 丁振勇, 王鹏, 郑铁元, 李伟. TFT-LCD行业显影液参数对半色调光刻胶膜厚的影响[J]. 液晶与显示, 2019, 34(12): 1161. CHEN Guo, HAN Ya-jun, YU Hong-lu, DING Zhen-yong, WANG Peng, CHUL Won, LI Wei. Effect of TFT-LCD developer parameters on halftone thickness[J]. Chinese Journal of Liquid Crystals and Displays, 2019, 34(12): 1161.
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