硫化锌薄膜的原子层沉积生长及表征
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孙常鸿, 张鹏, 张天宁, 陈鑫, 叶振华. 硫化锌薄膜的原子层沉积生长及表征[J]. 红外, 2017, 38(2): 1. SUN Chang-hong, ZHANG Peng, ZHANG Tian-ning, CHEN Xin, YE Zhen-hua. Growth and Characterization ofZnS Thin Films by Atomic Layer Deposition[J]. INFRARED, 2017, 38(2): 1.