[1] 姜晓明,王九庆,秦庆,等.中国高能同步辐射光源及其验证装置工程［J］.中国科学:物理学 力学 天文学,2014,44(10): 1075-1094.

    JIANG X M, WANG J Q, QIN Q,et al.. Chinese high energy photon source and the test facility［J］. Sci. Sin-Phys. Mech. Astron., 2014,44(10):1075-1094.(in Chinese)

[2] 卢启鹏,马磊,彭忠琦.变包含角平面光栅单色器波长扫描机构转角精度的检测方法研究［J］.光学 精密工程,2010,18(7):1548-1553.

    LU Q P,MA L,PENG ZH Q. Rotation-angle-acuracy measurement of scanning mechanism in variable included angle plane grating monochromater［J］. Opt. Precision Eng., 2010, 18(7):1548-1553.(in Chinese)

[3] 卢启鹏.高分辨掠入射软X射线-真空紫外单色仪［J］. 光学 精密工程, 1998,6(5): 91-95.

    LU Q P. High resolution grazing incidence soft X-ray and VUV monochromator ［J］.Opt. Precision Eng,1998,6,6(5):91-95.(in Chinese)

[4] 汤琦,马健康,周泗忠,等.弧矢聚焦双晶单色器设计［J］.光学 精密工程，2002,10(4):411-415.

    TANG Q, MA J K, ZHOU S ZH, et al.. Design of a sagittally focusing double-crystal monochromator in synchrotron radiation［J］.Opt. Precision Eng.,2002,10(4):411-415. (in Chinese)

[5] DUPARR A, FERRE-BORRULL J, GLIECH S, et al.. Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components［J］. Appl. Opt., 2002, 41(1): 154-171.

[6] TAKACS P Z, FENG S K, CHURCH E L, et al.. Long trace profile measurements on cylindrical aspheres［J］. SPIE,1988, 966:354-364.

[7] SIEWERT F, NOLL T, SCHLEGEL T, et al.. The nanometer optical component measuring machine: a new sub-nm topography measuring device for X-ray optics at BESSY［J］. AIP Conference Proceedings, 2004, 705(1): 847-850.

[8] ROMMEVEAUX A, ASSOUFID L, OHASHI H, et al.. Second metrology round-robin of APS, ESRF and SPring-8 laboratories of elliptical and spherical hard-x-ray mirrors［J］. SPIE ,2007,6704:67040B-1-12.

[9] BRAY M. Stitching interferometer for large plano optics using a standard interferometer［J］. SPIE,1997, 3134: 39-50.

[10] YUMOTO H,MIMURA H, HANDA S, et al.. Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature［J］. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2010, 616(2-3): 203-206.

[11] 刘斌, 王秋平, 傅绍军. 长程大型非球面轮廓测量仪的研究［J］. 激光与光电子学进展, 2006, 43(2):46-53.

    LIU B,WANG Q P,FU SH J. Investigation of long trace profiler for aspherical optics［J］. Laser & Optoelectronics Progress,2006, 43(2): 46-53.(in Chinese)

[12] 钱石南.大口径平面和非球面光学表面的纳米和纳弧度精度的测量—长行程外形仪的原理应用和发展［J］. 激光与光电子学进展,2008,45(5):16-25.

    QIAN SH N. Nanometer and nanoradian accuracy measurement of large scale plane and asphere—principle,applications and development of long trace profiler［J］. Laser & Optoelectronics Progress, 2008,45(5): 16-25. (in Chinese)

[13] 侯溪,伍凡,杨力,等.子孔径拼接干涉测试技术现状及发展趋势［J］.光学与光电技术,2005,3(3):50-53.

    HOU X,WU F,YANG L, et al.. Status and development trend of sub-aperture stitching interferometric testing technique［J］.Optics & Optoelectronics Technology,2005, 3(3):50-53. (in Chinese)

[14] OTSUBO M, OKADA K, TSUJIUCHI J, et al.. Measurement of large plane surface shape with interferometric aperture synthesis［J］. SPIE, 1992,1720: 444-447.

[15] MIMURA H,YUMOTO H, MATSUYAMA S, et al.. Microstitching interferometry for nano focusing mirror optics［J］.spie,2004, 5533: 171-180.

[16] KIM C J, WYANT J C. Sub-aperture test of a large flat on a fast aspheric surface ［J］. Opt. Soc. Am.,1981,71:1587.

[17] THUNEN J G, KWON O Y. Full aperture testing with subaperture test optics［J］. SPIE,1983,351: 19-27.

[18] CHOW W W, LAWRENCE G N. Method for sub-aperture testing interferogram reduction［J］. Optics Letters, 1983,8(9): 468-470.

[19] JENSEN S C, CHOW W W, LAWRENCE G N. Subaperture testing approaches: a comparison［J］. Applied Optics, 1984,23(5):740-745.

[20] STUHLINGER T W. Subaperture optical testing: experimental verification［J］. SPIE,1986,656:118-127.

[21] OTSUBO M, OKADA K, TSUJIUCHI J.Measurement of large plane surface shapes by connecting small-aperture interferograms［J］. Optical Engineering,1994,33(2): 608-613.

[22] BRAY M. Stitching interferometer for large optics using a standard interferometer. Description of an automated system［J］. SPIE,1997,3047: 911-918.

[23] TANG S. Stitching: high-spatial-resolution microsurface measurements over large areas［J］. SPIE, 1998,3479: 43-49.

[24] TANG S, CLENDENIN B. Measuring height variation over entire wafer surface with high lateral resolution［J］. SPIE, 2007,6672: 667209-1-7.

[25] BRAY M. Stitching interferometry: how and why it works［J］. SPIE, 1999,3739: 259-273.

[26] BRAY M. Stitching interferometry: Side effects and PSD［J］. SPIE, 1999,3782: 443-452.

[27] CATANZARO B E, THOMAS J A, COHEN E J. Comparison of full-aperture interferometry to sub-aperture stitched interferometry for a large diameter fast mirror［J］. SPIE, 2001, 4444: 224-237.

[28] SJODAL M, OREB B F. Stitching interferometric measurement data for inspection of large optical components［J］. Opt.Eng.,2002, 41(2):403-408.

[29] FLEIG J, DUMAS P, MURPHY P E, et al.. An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces［J］. SPIE, 2003,5188: 296-307.

[30] BRAY M. Stitching interferometry: Recent results and absolute calibration［J］. SPIE, 2004,5252: 305-313.

[31] MURPHY P, DEVRIES G, FLEIG J, et al.. Measurement of high-departure aspheric surfaces using subaperture stitching with variable null optics［J］. SPIE, 2009,7426:74260P-1-9.

[32] KULAWIEC A, MURPHY P, DE MARCO M. Measurement of high-departure aspheres using subaperture stitching with the Variable Optical Null(VONTM) ［J］. SPIE, 2010,7655:765512-1-4.

[33] TRICARD M, KULAWIEC A, BAUER M, et al.. Subaperture stitching interferometry of high-departure aspheres by incorporating a variable optical null［J］. CIRP Annals-Manufacturing Technology, 2010,59(1):547-550.

[34] SUPRANOWITZ C, MCFEE C, MURPHY P. Asphere metrology using variable optical null technology ［J］. SPIE, 2012,8416:841604-1-5.

[35] CHENG W M, CHEN M Y. Transformation and connection of sub-apertures in the multi-aperture overlap-scanning technique for large optics tests［J］. Opt. Eng., 1993,32(8):1947-1950.

[36] 陈善勇.非球面子孔径拼接干涉测量的几何方法研究［D］.长沙:国防科学技术大学, 2006.

    CHEN SH Y. Geometrical Approach to Subaperture Stitching Interferometry for Aspheric Surfaces［D］. Changsha: Graduate School of National University of Defense Technology,2006.(in Chinese)

[37] CHEN S Y, LI S Y, DAI Y F. An efficient iterative algorithm for subaperture stitching interferometry for aspheric surface［J］. SPIE, 2005,6024: 60241E-1-8.

[38] CHEN S Y, LI S Y, DAI Y F. Iterative algorithm for subaperture stitching interferometry for general surfaces［J］. J.Opt.Soc.Am.A,2005,22(9):1929-1936.

[39] CHEN S Y, LI S Y, DAI Y F, et al.. Iterative algorithm for subaperture stitching interferometry test with spherical interferometers［J］. J.Opt.Soc.Am.A,2006,23(5):1219-1226.

[40] CHEN S Y, ZHAO C Y, DAI Y F, et al.. Reconfigurable optical null based on counter-rotating Zernike plates for test of aspheres ［J］. Optics Express,2014,22(2):1381-1386.

[41] 张蓉竹,石琪凯,蔡邦维,等.子孔径拼接干涉检测实验研究［J］.光学技术,2004,30(2):173-175.

    ZHANG R ZH,SHI Q K,CAI B W, et al.. Study on the experiments of the stitching interferometer［J］.Optical Technique,2004,30(2):173-175. (in Chinese)

[42] 张蓉竹,杨春林,许乔,等.子孔径拼接干涉检测中去倾斜处理技术［J］.强激光与粒子束,2004,16(7):879-882.

    ZHANG R ZH,YANG CH L, XU Q, et al.. Anti-tilting technology of the sub-aperture stitching interferograms［J］. High Power Laser and Particle Beams, 2004,16(7):879-882.(in Chinese)

[43] 董军,张蓉竹,蔡邦维,等. 样本容量对子孔径拼接检测精度影响的分析［J］.光学与光电技术,2005,3(1):61-64.

    DONG J,ZHANG R ZH, CAI B W, et al.. Effect of sampling number on the stitching interferometer［J］. Optics & Optoelectronics Technology,2005, 3(1):61-64. (in Chinese)

[44] 候溪,伍凡,吴时彬,等.以环形子孔径扫描法测量大口径非球面的研究［J］.光电工程,2004,31(9):26-28,65.

    HOU X,WU F,WU SH B, et al.. Study on the measurement of large-aperture aspheric surfaces with annular sub-aperture scanning method［J］. Optoelectronic Engineering,2004,31(9):26-28,65. (in Chinese)

[45] 候溪,伍凡,吴时彬,等.使用环形子孔径扫描法测量大口径非球面镜［J］.光学技术,2005,7,31(4):506-508,512.

    HOU X,WU F,WU SH B, et al.. Testing the large aspheric mirror using annular subapertures［J］.Optical Technique,2005,7,31(4):506-508,512. (in Chinese)

[46] 汪利华,吴时彬,候溪,等.子孔径拼接干涉仪检测大口径平面波前［J］.光电工程,2009,36(6):126-130.

    WANG L H,WU SH B,HOU X, et al.. Measurement of flat wavefront by sub-aperture stitching interferometry［J］. Optoelectronic Engineering, 2009,36(6):126-130. (in Chinese)

[47] 王孝坤,王丽辉,张学军,等.子孔径拼接干涉法检测非球面［J］.光学 精密工程,2007,15(2):192-198.

    WANG X K, WANG L H,ZHANG X J, et al.. Testing asphere by sub-aperture stitching inter ferometric method［J］. Opt. Precision Eng.,2007,15(2):192-198. (in Chinese)

[48] WANG X K, WANG L H，YIN L H，et al.. Measurement of large aspheric surfaces by annular subaperture stitching interferometry［J］.Chinese Optics Letters,2007,5(11):645-647.

[49] WANG X K, ZHENG L G,ZHANG Z B, et al.. Subaperture stitching interferometry for testing a large hyperboloid［J］. Infrarel and Laser Engineering,2009,38(1):114-119.

[50] 王孝坤,郑立功,张学军.子孔径拼接干涉检测凸非球面的研究［J］.光学学报,2010,30(7):2022-2026.

    WANG X K, ZHENG L G,ZHANG X J. Testing convex aspheres by subaperture stitching interferometry［J］.Acta Optica Sinica,2010,30(7):2022-2026. (in Chinese)

[51] WANG X K,ZHENG L G,ZHANG B Z, et al.. Test of an off-axis asphere by subaperture stitching interferometry［J］.SPIE,2009,7283:72832J-1-6.

[52] 王孝坤.大口径凸非球面反射镜子孔径拼接检测［J］.红外与激光工程,2013,42(3):716-722.

    WANG X K. Test on large convex aspherical mirror by subaperture stitching interferometry［J］. Infrared and Laser Engineering,2013,42(3):716-722.(in Chinese)

[53] 王孝坤.利用子孔径拼接法测量大口径凸面反射镜［J］.应用光学,2013,34(1):95-100.

    WANG X K. Large convex mirror measurement by subaperture stitching interferometry［J］. Journal of Applied Optics,2013,34(1):95-100.(in Chinese)

[54] 徐建程,许乔,邓燕,等.环形光源在干涉仪系统中的应用［J］.强激光与粒子束,2008,20(3):367-370.

    XU J CH,XU Q,DENG Y, et al.. Application of ring source in interferometer［J］.High Power Laser and Particle Beams,2008,20(3):367-370. (in Chinese)

[55] 云宇,彭勇,田小强,等.基于子孔径拼接原理检测大口径光学元件［J］.强激光与离子束,2011,23(7):1831-1834.

    YUN Y, PENG Y, TIAN X Q, et al.. Research in technique of large aperture optical components test based on subaperture stitching［J］. High Power Laser and Particle Beams,2011,23(7):1831-1834. (in Chinese)

[56] 徐新华,王青,宋波,等.基于子孔径拼接技术的大尺寸光学材料均匀性检测系统［J］.光学学报,2012,32:0412002-1-7.

    XU X H, WANG Q, SONG B, et al.. Measurement system of optical homogeneity of large-size optical material based on subaperture stitching technique［J］. Acta Optica Sinica,2012,32:0412002-1-7.(in Chinese)

[57] 王宁,贾辛,刑廷文.子孔径拼接检测浅度非球面［J］. 红外与激光工程,2013,42(9):2525-2530.

    WANG N, JIA X, XING T W.Test of shallow asphere using sub-aperture stitching method［J］. Infrared and Laser Engineering, 2013,42(9):2525-2530.(in Chinese)

[58] ASSOUFID L, BRAY M, QIAN J, et al.. 3-D surface profile measurements of large x-ray synchrotron radiation mirrors using stitching interferometry［J］. SPIE,2002,4782: 21-28.

[59] YAMAUCHI K, YAMAMURA K, MIMURA H, et al.. Microstitching interferometry for x-ray reflective optics. Review of scientific instruments ［J］. American Institute of Physics, 2003, 74(5): 2894-2897.

[60] MIMURA H, YUMOTO H, MATSUYAMA S, et al.. Relative angle determinable stitching interferometry for hard x-ray reflective optics［J］. Review of Scientific Instruments,2005, 76(4): 045102-1-6.

[61] OHASHI H, TSUMURA T, OKADA H, et al.. Microstitching interferometer and relative angle determinable stitching interferometer for half-meter-long X-ray mirror［J］. SPIE,2007,6704:70405-1-8.

[62] YUMOTO H, MIMURA H, KIMURA T, et al.. Stitching interferometric metrology for steeply curved x-ray mirrors. Surface and interface analysis［J］.Surf. Interface Anal., 2008,40(6-7):1023-1027.

[63] YUMOTO H, MIMURA H, HANDA S, et al.. Stitching interferometric measurement system for hard x-ray nanofocusing mirrors［J］. Journal of Physics:Conference Series,2009, 186:012080-1-3.

[64] ROMMEVEAUX A, BARRETT R. Micro-stitching interferometry at the ESRF［J］. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2010, 616(2-3): 183-187.

[65] ROMMEVEAUX A V, LANTELME B, BARRETT R. ESRF metrology laboratory: overview of instrumentation, measurement techniques, and data analysis［J］. SPIE,2010,7801: 7801071-78010711.

[66] WIEGMANN A, STAVRIDIS M, WALZEL M, et al.. Accuracy evaluation for sub-aperture interferometry measurements of a synchrotron mirror using virtual experiments［J］. Precision Engineering,2011,35(2): 183-190.

[67] THOMASSET M, IDIR M, POLACK F, et al.. A new phase-shift microscope designed for high accuracy stitching interferometry ［J］. Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers,Detectors and Associated Equipment, 2013, 710: 7-12.

[68] SCHULZ G, SCHWIDER J. IV Interferometric testing of smooth surfaces［J］. Progress in Optics,1976,13: 93-167.

[69] FRITZ B S. Absolute calibration of an optical flat［J］. Optical Engineering,1984,23(4): 379-383.

[70] AI C Y, WYANT J C. Absolute testing of flats by using even and odd functions［J］. Applied Optics 1993,32(25): 4698-4705.

[71] EVANS C J, KESTNER R N. Test optics error removal［J］. Applied Optics,1996, 35(7): 1015-1021.

[72] HARIHARAN P. Interferometric testing of optical surfaces: absolute measurements of flatness［J］. Optical Engineering,1997,36(9): 2478-2481.

[73] POWELL I, GOULET E. Absolute figure measurements with a liquid-flat reference［J］. Applied Optics,1998,37(13): 2579-2588.

[74] GRIESMANN U.Three-flat test solutions based on simple mirror symmetry［J］. Applied Optics,2006,45(23): 5856-5865.

[75] YUMOTO H, MATSUYAMA S, MIMURA H,et al.. Absolute calibration of optical flats using the three-flat test by considering the relative humidity change［J］. Nuclear Instruments and Methods in Physics Research Section A:Accelerators,Spectrometers,Detectors and Associated Equipment,2013,710: 2-6.

[76] PREISSNER C, ASSOUFID L,SHU D M. Vibration diagnosis and remediation design for an x-ray optics stitching interferometer system ［J］. SPIE, 2004,5533: 131-139.

[77] YUAN S, CHURCH M, YASHCHUK V V, et al.. Elliptically bent x-ray mirrors with active temperature stabilization ［J］. X-Ray Optics and Instrumentation, 2010,2010:784732-1-9.