激光与光电子学进展, 2013, 50 (11): 110002, 网络出版: 2014-12-05
飞秒激光对硅表面微构造的研究进展 下载: 633次
Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure
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高胜淼, 韩培高, 闫珂柱. 飞秒激光对硅表面微构造的研究进展[J]. 激光与光电子学进展, 2013, 50(11): 110002. Gao Shengmiao, Han Peigao, Yan Kezhu. Research Progress of Femtosecond Laser Fabricating Silicon-Based Micro/Nano Structure[J]. Laser & Optoelectronics Progress, 2013, 50(11): 110002.