准分子激光扫描淀积PZT/YBCO结构铁电薄膜

赵建洪; 刘建设; 黄歆; 李兴教; 安承武; 陆冬生; 李再光

中国激光, 1997, 24 (4): 319, 网络出版: 2006-10-31

准分子激光扫描淀积PZT/YBCO结构铁电薄膜

Preparation of Pb(Zr_0.55Ti_0.45)O₃ Thin Films on YBCO/LaAlO₃ Using Excimer Laser

论文大纲

赵建洪 ¹刘建设 ¹黄歆 ¹李兴教 ¹安承武 ²陆冬生 ²李再光 ²

作者单位

¹ 华中理工大学固体电子学系, 武汉 430074

² 华中理工大学激光技术国家实验室, 武汉 430074

激光原位淀积铁电薄膜 PZT／YBCO／LaAlO3 PZT/YBCO/LaAlO3 PLD in situ ferroelectric thin film

摘要

利用脉冲准分子激光(工作气体XeCl,波长308 nm,脉宽28 ns)在外延YBCOLaAlO3(100)单晶基片上淀积了Pb(Zr0.55Ti0.45)O3铁电薄膜,YBCO薄膜既为生长高取向PZT薄膜提供了晶体匹配条件,同时也为PZT铁电薄膜提供了下电极。讨论了工艺参数对晶相结构和表面形貌的影响。用X射线衍射表征了该多层膜的晶相结构,扫描电镜观察其表面形貌。PZT铁电薄膜的剩余极化为21 μC/cm,矫顽场为65 kV/cm。

Abstract

Highly oriented Pb(Zr 0.55 Ti 0.45 )O 3(PZT) ferroelectric thin films have been grown on an epitaxial YBCO/LaAlO 3(100) single crystal substrate using pulsed laser deposition (XeCl excimer, λ=308 nm,τ=28 ns). The YBCO layer provides a seed for PZT growth and can also act as an electrode for the PZT thin films. These heterostructures were characterized using X ray diffraction, and the surface morphologies were observed using SEM. The PZT thin film showed a remnant polarization of 21 μC/cm2 and a coercive field of 65 kV/cm. The effects of processing parameters on structures and surface morphoiogies are discussed.

参考文献

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赵建洪, 刘建设, 黄歆, 李兴教, 安承武, 陆冬生, 李再光. 准分子激光扫描淀积PZT/YBCO结构铁电薄膜[J]. 中国激光, 1997, 24(4): 319. 赵建洪, 刘建设, 黄歆, 李兴教, 安承武, 陆冬生, 李再光. Preparation of Pb(Zr_0.55Ti_0.45)O₃ Thin Films on YBCO/LaAlO₃ Using Excimer Laser[J]. Chinese Journal of Lasers, 1997, 24(4): 319.

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