中国激光, 2011, 38 (11): 1107003, 网络出版: 2011-10-24  

钬激光器用高反膜的制备及其工艺研究

Preparation and Technical Study of High-Reflectance Mirrors for Holmium Laser System
作者单位
中国科学院上海光学精密机械研究所, 上海 201800
摘要
采用红外石英作为基底材料,利用SiO2/ZrO2膜系制备2100 nm波段钬激光器0°高反膜。提出一套完整的优化工艺,解决了薄膜的材料(膜料和基底)本身的水吸收,克服了薄膜表面光洁底差、散射吸收损耗大、容易破裂等问题,镀制出的薄膜在激光使用波长透射率小于0.1%,粗糙度小于1 nm,并且具有长期稳定性好,可靠性高等特点。
Abstract
ZrO2/SiO2 multilayer mirrors at normal incidence are deposited on the infrared quartz substrates for the application of holmium laser. The deposition process is optimized to overcome the water intrinsic absorption, surface scattering loss, mechanical stress of thin film materials. The transmittance and the surface roughness of mirror is less than 0.1% at the wavelength of 2.1 μm and 1nm, respectively. The deposited mirrors show long-term stability and high reliability in the application of holmium-laser system.
参考文献

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宋永香, 黄建兵, 于振坤, 齐红基. 钬激光器用高反膜的制备及其工艺研究[J]. 中国激光, 2011, 38(11): 1107003. Song Yongxiang, Huang Jianbing, Yu Zhenkun, Qi Hongji. Preparation and Technical Study of High-Reflectance Mirrors for Holmium Laser System[J]. Chinese Journal of Lasers, 2011, 38(11): 1107003.

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