Opto-Electronic Advances, 2019, 2 (9): 09190021, Published Online: Nov. 20, 2019
Etching-assisted femtosecond laser modification of hard materials 
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Fig. 1. Laser induced refractive index change for fabrication of photonic crystals in LiNbO3.
(a ) Schematic diagram. (b ) The relationship of the amplitude of second-harmonic and the phase-matching mechanism. (c ) and (d ) Second-harmonic confocal microscopy image of the 3D photonic crystal and which in X -Y plane. (e ) Intensity distribution along the black line in (d). Figure reproduced from ref.44, Springer Nature.
Fig. 2. Laser induced phase change.
(a ) Schematic diagram of the fabrication of phase change in sapphire by femtosecond laser. (b ) MicroX-ray diffraction measurement for evidence on the formation of bcc-Al. (c ) Schematic of phase transformations in laser modified sapphire. (d ) Laser induced phase change in GST films for fabrication of field emission transistor. (e ) TEM image and (f ) electron diffraction patterns of laser induced crystalline-to-amorphous transition in sapphire. Figure reproduced from (a-c) ref.54, Springer Nature; (d) ref.56, AIP Publishing; (e, f) ref.57, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Fig. 3. Laser induced materials components change.
(a ) Schematic of formations of Ag nanoparticles inside silver containing zinc phosphate glasses by femtosecond laser. (b ) Laser induced helicoidally-distributed emitting silver clusters arrays. (c ) Demonstration of femtosecond laser doping of silver into titanium surface. Figure reproduced from (a, b) ref.61, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim; (c) ref.59, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Fig. 4. 3D optofluidic microlens integrated in microchannels.
(a ) Schematic of fabrication process. Optical images of microlens in microchannels (b ) after laser modification and (c ) after complete formation. (d-f ) Focusing properties of microlens in microchannels in air, ethanol and sucrose solution, respectively. Figure reproduced from (a-f) ref.80, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Fig. 5. Subwavelength gratings and optical waveguide fabricated in YAG crystals by wet etching assisted femtosecond laser modification.
(a ) Optical images of the gratings with centimeter-long and 700 nm-pitch. (b ) Diffraction efficiency of the gratings with a wavelength of 1070 nm. The insert image is the SEM of the fabricated gratings. (c ) The cross-section SEM image of the optical waveguide in YAG crystal. (d ) Simulated and (e ) experimental light intensity mode profiles of the optical waveguide with a wavelength of 1550 nm. Figure reproduced from (a-e) ref.89, Springer Nature.
Fig. 6. 3D arbitrary micro-architectures fabricated in silicon wafer The SEM image of (a ) high-aspect-ratio micropillars array and (b ) sidewall of embedded microchannels inside silicon. Inset in (a) is the amplified view of the micropillars array. Inset in (b) is 3D profiles of the microchannels that was measured by laser scanning microscopy. (c ) The SEM image of 3D cantilever-like structures. (d ) SEM image of silicon plates. (e ) An artificially coloured SEM image of a complex silicon micro-cityscape. Figure reproduced from (a-e) ref.90, Springer Nature.
Fig. 7. Fabrication of 3D polymer compound eyes.
(a ) Diagram of fabrication of polymer compound eyes by replication of microlens arrays mask fabricated by femtosecond laser modification with subsequent wet etching. (b-d) SEM images of the polymer compound eye. Figure reproduced from (a-d) ref.95, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Fig. 8. Fabrication of silicon concave microlens arrays by dry-etching-assisted femtosecond laser modification.
(a ) Diagram of fabrication of silicon microlens arrays. (b ) Diagram of the evolution of the microlens formation. (c ) SEM of the closely packed silicon concave microlens arrays. (d ) SEM of microlens integrated on the micro-cantilever. Figure reproduced from (a-d) ref.97, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Fig. 9. K9 glass compound eyes.
(a ) Diagram of the fabrication of sapphire compound eyes and the thermal replication of K9 glass compound eyes. (b ) Optical image and (c, d ) SEM of the centimeter-sized K9 glass compound eye. Insert in (d) is the amplified SEM image. (e-g ) Optical images of focal spots with incident angle of 0°, 30° and 45°, respectively. Figure reproduced from (a-g) ref.100, WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Fig. 10. Dry-etching assisted femtosecond laser gray-scale modification.
(a ) Diagram of the fabrication process. (b ) SEM of 2D Fresnel zone plate pattern fabricated by femtosecond laser modification. (c ) SEM of 3D well-defined Fresnel zone plate fabricated by transferring of 2D pattern with subsequent dry etching. Figure reproduced from (a-c) ref.104, AIP Publishing.
Xue-Qing Liu, Ben-Feng Bai, Qi-Dai Chen, Hong-Bo Sun. Etching-assisted femtosecond laser modification of hard materials[J]. Opto-Electronic Advances, 2019, 2(9): 09190021.
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