Etching-assisted femtosecond laser modification of hard materials

Xue-Qing Liu; Ben-Feng Bai; Qi-Dai Chen; Hong-Bo Sun

doi:doi:10.29026/oea.2019.190021

Opto-Electronic Advances, 2019, 2 (9): 09190021, Published Online: Nov. 20, 2019

Etching-assisted femtosecond laser modification of hard materials Download： 1452次

Xue-Qing Liu ¹Ben-Feng Bai ¹Qi-Dai Chen ²Hong-Bo Sun ^1,2,*

Author Affiliations

¹ State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China

² State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

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Xue-Qing Liu, Ben-Feng Bai, Qi-Dai Chen, Hong-Bo Sun. Etching-assisted femtosecond laser modification of hard materials[J]. Opto-Electronic Advances, 2019, 2(9): 09190021.