光学学报, 2019, 39 (4): 0412013, 网络出版: 2019-05-10
基于立方体分光棱镜的干涉投影傅里叶变换轮廓术 
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Interferometric Projection Fourier Transform Profilometry Based on Cube Beam Splitting Prism
图 & 表
图 4. 干涉图样。(a) θ=3.55°时的模拟干涉条纹;(b) θ=3.57°时的模拟干涉条纹;(c) θ=3.58°时的模拟干涉条纹;(d) θ=2°时的实际干涉条纹;(e) θ=3°时的实际干涉条纹
Fig. 4. Interference patterns. (a) Simulated interference fringe when θ=3.55°; (b) simulated interference fringe when θ=3.57°; (c) simulated interference fringe when θ=3.58°; (d) actual interference fringe when θ=2°; (e) actual interference fringe when θ=3°
图 6. 待测物体。(a)实物及变形条纹图;(b)相位展开图
Fig. 6. Object to be measured. (a) Physical object and deformed fringe pattern; (b) phase unwrapping pattern
图 7. 不同位置的各标定平面同一行的相位分布图。(a)解相前;(b)解相后
Fig. 7. Phase distribution maps of the same row of each calibration plane at different positions. (a) Before unwrapping; (b) after unwrapping
图 8. 测量系统的标定结果。(a)参数a;(b)参数b
Fig. 8. Calibration results of measurement system. (a) Parameter a; (b) parameter b
图 9. 实验结果。(a)三坐标机测量图;(b)物体的三维形貌图;(c)误差分布图
Fig. 9. Experiment results. (a) Three coordinate machine measurement chart; (b) three-dimensional topography of object; (c) error distribution map
李小燕, 文永富, 程灏波, 吴恒宇, 王华英. 基于立方体分光棱镜的干涉投影傅里叶变换轮廓术[J]. 光学学报, 2019, 39(4): 0412013. Xiaoyan Li, Yongfu Wen, Haobo Cheng, Hengyu Wu, Huaying Wang. Interferometric Projection Fourier Transform Profilometry Based on Cube Beam Splitting Prism[J]. Acta Optica Sinica, 2019, 39(4): 0412013.
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