用热应力法研究二氧化碲晶体表面连接层材料的特性

付秀华; 潘永刚; 董军; 刘冬梅; 张静

doi:doi:10.3788/gzxb20164501.0131001

光子学报, 2016, 45 (1): 0131001, 网络出版: 2016-03-22

用热应力法研究二氧化碲晶体表面连接层材料的特性

The Characteristic of Connecting Layer Material on TeO2 Crystal Surface by Thermal Stress Method

论文大纲

付秀华 ^1,*潘永刚 ¹董军 ²刘冬梅 ¹张静 ¹

作者单位

¹ 长春理工大学光电工程学院, 长春 130022

² 长春一东离合器股份有限公司, 长春 130012

摘要

以声光晶体TeO2为衬底, 设计并研制了1 300~3 400 nm波段超宽带减反射膜.从薄膜热应力理论出发, 建立膜层热应力受力示意图, 结合TeO2晶体的特性和力矩判定方法, 采用解析法逆向计算分析薄膜材料的热膨胀系数及杨氏模量.实验验证表明: 所制备的膜层附着力在1300~3400nm波段平均透过率为96.8%;在相同工艺条件下, 采用连接层所制备的薄膜附着力更好, 可以解决脱膜问题, 满足相应的附着力检测要求.

Abstract

The ultra-broad band anti-reflection film of 1300~3400nm waveband was designed and fabricated on TeO2 acousto-optic crystal. Starting the theory of thermal stress of thin film with the properties of TeO2,the stress diagrammatic sketch of thin film was established.Combing the properties of TeO2 crystal with torque determination method, the thermal expansion coefficient and Young’s modulus of the thin film materials were analyzed by analytical method of reverse calculation.The experiments show that the adhesion is better prepared under the same process conditions by using connecting layer. The film is protected from the problem of stripping and meets the corresponding requirements of adhesion test.

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付秀华, 潘永刚, 董军, 刘冬梅, 张静. 用热应力法研究二氧化碲晶体表面连接层材料的特性[J]. 光子学报, 2016, 45(1): 0131001. FU Xiu-hua, PAN Yong-gang, DONG Jun, LIU Dong-mei, ZHANG Jing. The Characteristic of Connecting Layer Material on TeO2 Crystal Surface by Thermal Stress Method[J]. ACTA PHOTONICA SINICA, 2016, 45(1): 0131001.

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