激光与光电子学进展, 2020, 57 (3): 033101, 网络出版: 2020-02-17
TiO2薄膜表面粗糙度与散射特性研究 
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Surface Roughness and Scattering Characteristics of TiO2 Thin Film
图 & 表
图 2. 不同薄膜表面粗糙度的XBRDFcosθs随散射角变化曲线
Fig. 2. Curves of XBRDFcosθs changed with different scattering angles under different film surface roughnesses
图 3. 不同沉积速率下TiO2薄膜的表面特性。(a)表面粗糙度与沉积速率的关系;(b)不同表面粗糙度下表面散射量与散射角的关系曲线
Fig. 3. Surface characteristics of TiO2 thin films at different deposition rates. (a) Relationship between surface roughness and deposition rate; (b) curves of surface scattering and scattering angle under different surface roughnesses
图 4. 不同沉积角度下TiO2薄膜的表面特性。(a)表面粗糙度与入射沉积角的关系;(b)不同表面粗糙度下表面散射与散射角的关系曲线
Fig. 4. Surface characteristics of TiO2 thin films at different deposition angles. (a) Relationship between surface roughness and incident deposition angle; (b) curves of surface scattering and scattering angle under different surface roughnesses
刘金泽, 潘永强, 张达, 樊彦峥. TiO2薄膜表面粗糙度与散射特性研究[J]. 激光与光电子学进展, 2020, 57(3): 033101. Jinze Liu, Yongqiang Pan, Da Zhang, Yanzheng Fan. Surface Roughness and Scattering Characteristics of TiO2 Thin Film[J]. Laser & Optoelectronics Progress, 2020, 57(3): 033101.
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