TiO2薄膜表面粗糙度与散射特性研究 下载: 1281次
刘金泽, 潘永强, 张达, 樊彦峥. TiO2薄膜表面粗糙度与散射特性研究[J]. 激光与光电子学进展, 2020, 57(3): 033101.
Jinze Liu, Yongqiang Pan, Da Zhang, Yanzheng Fan. Surface Roughness and Scattering Characteristics of TiO2 Thin Film[J]. Laser & Optoelectronics Progress, 2020, 57(3): 033101.
[1] 牛玉宝. 激光陀螺反射镜基片的光学散射特性研究[D]. 哈尔滨: 哈尔滨工业大学, 2018: 1- 7.
Niu YB. Scatter properties study of reflector substrate in laser gyro[D]. Harbin: Harbin Institute of Technology, 2018: 1- 7.
[2] 李志军. 遗迹引力波探测实验中的噪声分析[D]. 武汉: 华中科技大学, 2007: 26- 34.
Li ZJ. Noises in relic gravitational wave detecting experiment[D]. Wuhan: Huazhong University of Science and Technology, 2007: 26- 34.
[3] 王世通, 杨甬英, 赵丽敏, 等. 光学元件表面缺陷散射光成像数值模拟研究[J]. 中国激光, 2015, 42(7): 0708005.
[4] 吴晗, 张锦龙, 李刚正, 等. 单层柱状结构薄膜体散射的理论研究[J]. 光学学报, 2016, 36(3): 0331001.
[5] Harada T, Murotani H, Matumoto S, et al. Influence of substrate surface roughness on light scattering of TiO2 optical thin films[J]. Chinese Optics Letters, 2013, 11(Suppl.): S10303.
[6] Schröder S, Herffurth T, Trost M, et al. Angle-resolved scattering and reflectance of extreme-ultraviolet multilayer coatings: measurement and analysis[J]. Applied Optics, 2010, 49(9): 1503-1512.
[7] Schröder S, Trost M, Garrick M, et al. Origins of light scattering from thin film coatings[J]. Thin Solid Films, 2015, 592: 248-255.
[8] 潘永强, 吴振森, 杭凌侠. 光学薄膜界面粗糙度互相关特性与光散射[J]. 中国激光, 2008, 35(6): 916-920.
[9] 潘永强, 杨琛. 二氧化钛薄膜表面粗糙度研究[J]. 应用光学, 2018, 39(3): 400-404.
[10] Jacobson R D, Wilson S R. Al-Jumaily G A, et al. Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques[J]. Applied Optics, 1992, 31(10): 1426-1435.
[11] Duparré A, Ferre-Borrull J, Gliech S, et al. Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components[J]. Applied Optics, 2002, 41(1): 154-171.
[12] Duparré A, Kassam S. Relation between light scattering and the microstructure of optical thin films[J]. Applied Optics, 1993, 32(28): 5475-5480.
刘金泽, 潘永强, 张达, 樊彦峥. TiO2薄膜表面粗糙度与散射特性研究[J]. 激光与光电子学进展, 2020, 57(3): 033101. Jinze Liu, Yongqiang Pan, Da Zhang, Yanzheng Fan. Surface Roughness and Scattering Characteristics of TiO2 Thin Film[J]. Laser & Optoelectronics Progress, 2020, 57(3): 033101.