光电子技术, 2020, 40 (2): 149, 网络出版: 2020-08-13
基于傅里叶级数的光栅加工误差分析 下载: 668次
Fourier⁃series⁃based Analysis of Grating Processing Error
光栅 衍射效率 傅里叶级数 高频分量 陡直度 grating diffraction efficiency Fourier series high frequency component steepness
摘要
针对浮雕光栅实际加工的光栅形貌与理论设计形貌存在差异的情况,提出从傅里叶级数的角度去分析光栅结构,探讨光栅傅里叶级数展开式中各空间频率分量对其结构和衍射效率的影响,试图在保证高衍射效率的同时,降低光栅的制备难度。对常见的周期性浮雕光栅进行傅里叶级数展开,减少高频分量,代入仿真软件建模并计算其衍射效率。仿真结果表明:对于矩形光栅,光栅陡直度为46.3°时即可满足最高衍射效率要求;而对于直角三角光栅,光栅陡直度为80.4°并且光刻分辨率不低于300 nm时才可满足最高衍射效率。针对不同结构的浮雕光栅,在满足最高衍射效率时保留的高频含量是不同的,文中提出的分析方法能帮助设计者根据具体的光栅结构,提出加工精度要求,制定具体加工方案,降低加工制备难度。
Abstract
There are differences in grating profile between the actual processing and the theoretical design of the relief grating. An analysis method based on Fourier series was presented, which could help explore the influence of spatial frequency components on the structure and diffraction efficiency of the grating so as to reduce the difficulty of grating preparation while ensuring high diffraction efficiency. Firstly, Fourier series expansion was performed on common periodic relief gratings to establish the simulation model without the high-frequency components. The simulation results show that for rectangular gratings, the maximum diffraction efficiency could be achieved when the grating steepness was 46.3°, and for the right triangular grating, the grating steepness was 80.4° and the lithography resolution was not less than 300 nm when the diffraction efficiency was satisfied. For the relief gratings with different structures, the number of high-frequency components were different when the highest diffraction efficiency was satisfied. The proposed analysis method could help the designer to propose the processing precision according to the specific grating profile and formulate the specific processing. The program could reduce the difficulty of processing and preparation.
丁闪闪, 冯奇斌, 鲁婷婷, 王梓, 吕国强. 基于傅里叶级数的光栅加工误差分析[J]. 光电子技术, 2020, 40(2): 149. Shanshan DING, Qibin FENG, Tingting LU, Zi WANG, Guoqiang LYU. Fourier⁃series⁃based Analysis of Grating Processing Error[J]. Optoelectronic Technology, 2020, 40(2): 149.