垂直梳齿驱动的大尺寸MOEMS扫描镜
刘英明, 徐静, 钟少龙, 翟雷应, 吴亚明. 垂直梳齿驱动的大尺寸MOEMS扫描镜[J]. 光学 精密工程, 2013, 21(2): 400.
LIU Ying-ming, XU Jing, ZHONG Shao-long, ZHAI Lei-ying, WU Ya-ming. Large-scale MOEMS scanning mirror actuated by vertical comb[J]. Optics and Precision Engineering, 2013, 21(2): 400.
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刘英明, 徐静, 钟少龙, 翟雷应, 吴亚明. 垂直梳齿驱动的大尺寸MOEMS扫描镜[J]. 光学 精密工程, 2013, 21(2): 400. LIU Ying-ming, XU Jing, ZHONG Shao-long, ZHAI Lei-ying, WU Ya-ming. Large-scale MOEMS scanning mirror actuated by vertical comb[J]. Optics and Precision Engineering, 2013, 21(2): 400.