[1] FERREIRA L O S, MOEHLECKE S, A silicon micromechanical galvanometric scanner ［J］. Sensors and Actuators A:Physical,1999,73(3):252-260.

[2] CHAN Y C, WONG C C, WANG C, et al.. Design and fabrication of a MEMS scanning mirror with and without comb offset ［C］. Proceedings of the 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, China, 2010: 186-190.

[3] 穆参军, 张飞岭, 吴亚明. 新型大尺寸电磁驱动MEMS光学扫描镜的研制［J］.半导体学报, 2008, 29(3): 583-587.

    MU C J, ZHANG F L, WU Y M. A novel large-scale electromagnetically actuated MEMS optical scanning mirror ［J］. Journal of semiconductors, 2008, 29(3): 583-587.(in Chinese)

[4] LI K Y, MISHRA S, TIRUVEEDHULA P, et al..Comparison of control algorithms for a MEMS-based adaptive optics scanning laser ophthalmoscope ［C］. Proceedings of the American Control Conference: ACC '09, 2009: 3848-3853.

[5] LI Y W, YANG H B, YUAN G Q, et al.. Design and optimization of supporting structure for scanning mirror in aviation remote sensor ［J］. Proceedings of the Electric Information and Control Engineering: ICEICE, 2011: 3134-3138.

[6] 董光焰, 刘中杰. 光学MEMS微镜技术及其在激光雷达中的应用［J］.中国电子科学研究院学报, 2011, 6(1): 36-38.

    DONG G Y, LIU ZH J. MOEMS microlens technique and its application on lidar ［J］. Journal of CAEIT, 2011, 6(1): 36-38.(in Chinese)

[7] LI D C, WU W G, YUAN Y, et al.. Design, fabrication and characterization of novel micromirror with vertical torsion comb driver ［J］. Nanotechnology and Precision Engineering, 2006, 4(2):122-127.

[8] 肖育华, 宋朝辉, 戈肖鸿, 等. 基于硅塑性变形的蛇形梁垂直梳齿驱动器［J］. 传感器与微系统, 2011, 30(3): 141-144.

    XIAO Y H, SONG ZH H, GE X H, et al.. Serpentine elastic beam vertical comb actuator using silicon plastic deformation ［J］. Transducer and Microsystem Technologies, 2011, 30(3): 141-144.(in Chinese)

[9] CHEN CH A, CHIU Y. Flip-up micro scanning mirror with vertical comb drive assembled by simple push operations ［C］. Proceedings of the 16th International Conference on Optical MEMS and Nanophotonics, Istanbul, Turkey: OMN, 2011: 189-190.

[10] SHAO Y, DAVID L. DICKENSHEETS, et al.. 3-D MOEMS mirror for laser beam pointing and focus control ［J］. IEEE Journal of Selected Topics in Quantum Electronics, 2004, 10(3): 528-535.

[11] 李四华, 刘玉菲, 高翔, 等. 微机电系统扭转微镜面驱动器的研制［J］. 半导体学报, 2006, 27( 4): 756-760.

    LI S H, LIU Y F, GAO X, et al.. Analysis and fabrication o f torsion micromirror actuators based on a MEMS technology ［J］. Chinese Journal of Semiconductors, 2006, 27(4):756-760. ( in Chinese)

[12] GREYWALL D S, PAI C S, OH S H, et al.. Monolithic fringe-field-activated crystalline silicon tilting-mirror devices ［J］. Journal of Microelectromechanical Systems, 2003, 12(5): 702-706.

[13] 李四华, 徐静, 龙亮, 等. 多台阶平板静电驱动的高占空比微镜阵列的研制［J］. 光学 精密工程, 2011, 19(8): 1816-1823.

    LI S H, XU J, LONG L, et al.. Fabrication of high fill-factor micro-mirror array with multi-terraced-plate structure ［J］. Opt. Precision Eng., 2011, 19(8): 1816-1823. (in Chinese)

[14] GALLAGHER E, MOUSSA W, MCDERMOTT M.A review of fabrication processes for vertical comb drives ［J］. Microsystem Technologies-Micro-and Nano systems-Information Storage and Processing Systems, 2012, 18(4): 381-397.

[15] SELVAKUMAR A, NAJAFI K. Vertical comb array microactuators ［J］. Journal of Microelectromechanical Systems, 2003, 12(4): 440-449.

[16] LI S H, XU J, ZHONG SH L, WU Y M. Design, fabrication and characterization of a high fill-factor micromirror array for wavelength selective switch applications ［J］. Sensors and Actuators A. 2011, 171: 274-282.

[17] MARXER C, THIO C, GRETILLAT M A, et al.. Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications ［J］. Journal of Microelectromechanical Systems. 1997, 6(3): 277-285.

[18] JUNG I W, KRISHNAMOORTHY U, SOLGAARD O. High fill-factor two-axis gimbaled tip-tilt-piston micromirror array actuated by self-aligned vertical electrostatic comb drives ［J］. Journal of Microelectromechanical Systems. 2006, 15(3): 563-571.

[19] 黄占喜, 吴亚明, 李四华. 基于多掩膜光刻工艺的MEMS体硅加工［J］. 功能材料与器件学报, 2011, 17(3): 315-318.

    HUANG ZH X, WU Y M, LI S H. MEMS bulk silicon process based on multi-mask photolithograph ［J］. Journal of Functional Materials and Devices, 2011, 17(3):315-318. (in Chinese)