激光技术, 2011, 35 (5): 708, 网络出版: 2011-09-09  

KrF准分子激光刻蚀PMMA研究

Research of PMMA etched by KrF excimer laser
作者单位
1 菏泽学院 物理系,菏泽 274015
2 山东师范大学 物理与电子科学学院,济南 250014
引用该论文

马美娟, 张运海, 满宝元. KrF准分子激光刻蚀PMMA研究[J]. 激光技术, 2011, 35(5): 708.

MA Mei-juan, ZHANG Yun-hai, MAN Bao-yuan. Research of PMMA etched by KrF excimer laser[J]. Laser Technology, 2011, 35(5): 708.

参考文献

[1] CHU X M, GU P L, YANG J X. Study on technical parameters of laser welding HDPE plastics[J]. Laser Technology, 2010,34(1): 116-119(in Chinese).

[2] XU R Q, CUI Y P, ZHAO R, et al.A ttenuation of laser generated shock waves in Plexiglas[J]. Laser Technology, 2008,32(3): 225-227,243(in Chinese).

[3] CHEN J, ZHANG Q L, YAO J H, et al.Influence of surface roughness on la ser absorptiv ity[J]. Laser Technology, 2008,32(6): 624-627(in Chinese).

[4] LI Y L, WANG W P. Laser interaction with polymers and its applications[J]. Electro-optic Technology Application,2010,25(2): 8-13(in Chinese).

[5] ZHANG L, LOU Q H, WEI Y R, et al. Comparison of etching characteristics of polymers by 193nm and 308nm excimer laser radiation[J]. Chinese Journal of Lasers,2002,29(1): 25-28(in Chinese).

[6] LIU A H, ZHANG Y H, MAN B Y. Surface modification and ablation of polytetrafluorethylene by excimer laser irradiation [J].Acta Optica Sinica, 2006,26(7): 1073-1077(in Chinese).

[7] ZHU X L, LIU Sh B, CHENG T, et al. Analysis of X-ray photoelectron spectroscopy of polymethyl methacrylate etched by a KrF excimer laser[J]. Chinese Physics Letters, 2005,22(6): 1526-1529.

[8] WEI R X, JIANG D Sh, ZHOU Z D. Relationship between average etching velocity and laser pulse energy density during excimer laser direct etching[J]. Optics and Precision Engineering, 2004,12(2): 231-234(in Chinese).

[9] WANG J Q, WU W H, FENG D M. Introduction to electron spectroscopy (XPS/XAES/UPS)[M]. Beijing: National Defense Industry Press,1992: 190-191(in Chinese).

[10] ZHAO Zh Y, HOU D Sh, DONG X Ch, et al.Research on etching properties of polycarbonate by KrF excimer laser[J]. Opto-Electronic Engineering,2004,31(2): 4-7(in Chinese).

[11] WOCHNOWSKI C, METEV S, SEPOLD G. UV-laser-assisted modification of the optical properties of polymethylmethacrylate[J]. Applied Surface Science, 2000,154/155(1): 706-711.

马美娟, 张运海, 满宝元. KrF准分子激光刻蚀PMMA研究[J]. 激光技术, 2011, 35(5): 708. MA Mei-juan, ZHANG Yun-hai, MAN Bao-yuan. Research of PMMA etched by KrF excimer laser[J]. Laser Technology, 2011, 35(5): 708.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!