激光技术, 2011, 35 (5): 708, 网络出版: 2011-09-09
KrF准分子激光刻蚀PMMA研究
Research of PMMA etched by KrF excimer laser
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马美娟, 张运海, 满宝元. KrF准分子激光刻蚀PMMA研究[J]. 激光技术, 2011, 35(5): 708. MA Mei-juan, ZHANG Yun-hai, MAN Bao-yuan. Research of PMMA etched by KrF excimer laser[J]. Laser Technology, 2011, 35(5): 708.
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