2 m 量级SiC 非球面反射镜的摆臂轮廓检测

提出采用摆臂式轮廓检测的方法，实现超大口径SiC反射镜面形的高精度轮廓检测。阐述了采用摆臂轮廓仪检测超大口径反射镜的基本原理和具体实施流程；介绍了基于扫描线交点高度一致性的特点进行面形重构的算法，以及针对离焦量测量不准的问题，采用激光跟踪仪对面形离焦量进行辅助测量的手段，建立了综合优化的检测模型；结合实例对口径为2040 mm 的同轴抛物面SiC反射镜进行了摆臂轮廓检测，检测精度均方根(RMS)为0.46 μm，与干涉仪检测结果对比偏差0.03 μm。该技术与加工机床集成实现了反射镜的在位检测，以非球面的最接近球面为测量基准，提供了一种精确、高效地测量超大口径光学非球面面形的方法，满足了大口径SiC反射镜在研磨阶段的高精度轮廓检测需求。

Abstract

For the measurement of large SiC mirror before interferometry test, the method of swing arm profilometry (SAP) is introduced. The basic principle and flow chart of SAP are presented; with surface reconstructed based on consistency of surface height at scan crossings and defocusing amount of mirror surface measured with a laser tracker as supplementary, an optimized test model is built. As an example, a 2040 mm SiC mirror is tested by SAP, with accuracy of 0.46 μm root mean square (RMS), which is 0.04 μm deviation from interferometric test. As a best-fitting sphere being basement of the test, in situ metrology is implemented; this method provides an accurate and efficient way to measure a large mirror, and meet the need of high-accuracy measurement of large SiC mirrors during grinding.

参考文献

[1] 康健, 宣斌, 谢京江. 表面改性碳化硅基底反射镜加工技术现状[J]. 中国光学, 2013, 6(6): 824-833.

Kang Jian, Xuan Bin, Xie Jingjiang. Manufacture technology status of surface modified silicon carbide mirrors[J]. Chinese Optics, 2013, 6(6): 824-833.

[2] 张峰. 大口径离轴非球面碳化硅反射镜的加工[J]. 光学学报, 2013, 33(s2): s222001.

Zhang Feng. Fabrication of large off-axis asphere silicon carbide mirror[J]. Acta Optica Sinica, 2013, 33(s2): s222001.

[3] 李锐钢, 郑立功, 张峰, 等. 大口径高陡度离轴非球面精磨阶段的数控加工[J]. 光学精密工程, 2007, 15(5): 633-639.

Li Ruigang, Zheng Ligong, Zhang Feng, et al... Computer controlled manufacturing during fine grinding stage of highly steep off-axis asphere with large aperture[J]. Optics and Precision Engineering, 2007, 15(5): 633-639.

[4] 张峰. 纳米级面形精度光学平面镜加工[J]. 中国光学, 2014, 7(4): 616-621.

Zhang Feng. Fabrication of optical flat mirror with nanometer surface error[J]. Chinese Optics, 2014, 7(4): 616-621.

[5] 张志宇, 李锐钢, 郑立功, 等. 离轴非球面SiC反射镜的精密铣磨加工技术木[J]. 机械工程学报, 2013, 49(17): 39-45.

Zhang Zhiyu, Li Ruigang, Zheng Ligong, et al.. Precision grinding technology for the off-axis aspherical silicon carbide mirror blank[J]. Journal of Mechanical Engineering, 2013, 49(17): 39-45.

[6] 王孝坤. 大口径离轴碳化硅非球面反射镜加工与检测技术研究[J]. 激光与光电子进展, 2012, 49(1): 011201.

Wang Xiaokun. Fabrication and testing of large aperture off-axis SiC aspheric mirror[J]. Laser & Optoelectronics Progress, 2012, 49(1): 011201.

[7] 王孝坤．大口径碳化硅反射镜面形子孔径拼接干涉检测[J]. 激光与光电子学进展, 2013, 50(5): 051202.

Wang Xiaokun.Testing large SiC mirror by subaperture stitching interferometry[J]. Laser & Optoelectronics Progress, 2013, 50(5): 051202.

[8] 薛栋林. 大口径标准球面镜组研制与应用[J]. 中国激光, 2014, 41(6): 0616001.

Xue Donglin. Manufacture and application of large aperture standard transmission spheres[J]. Chinese J Lasers, 2014, 41(6): 0616001.

[9] Anderson D S, Parks R E, T Shao. A versatile profilometer for the measurement of aspherics[C]. Proc OF&T Workshop Technical Digest, 1990,11:119-122.

[10] Su P, Oh C J, Parks R E, et al.. Swing arm optical CMM for aspherics[C]. SPIE, 2009, 7426: 74260J.

[11] 罗霄. 采用平转动应力盘技术加工超大口径非球面的研究[D]. 长春: 中国科学院长春光学精密机械与物理研究所, 2011: 67-86.

Luo Xiao. Fabrication of Large Aspherics Using Stressed Lap with Orbital Tool Motion [D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2011: 67-86.

[12] Burge J H, Su P, Zhao C, et al.. Use of a commercial laser tracker for optical alignment[C]. SPIE, 2007, 6676: 66760E.

[13] Zobrist T L, Burge J H, Davison W B, et al.. Measurements of large optical surfaces with a laser tracker[C]. SPIE, 2008,7018: 70183U.

[14] 陈新东, 李锐钢. 非球面Null Lens补偿检测中采用激光跟踪仪测量几何参数方法研究[J]. 中国激光, 2015, 42(5): 0508007.

Chen Xindong, Li Ruigang. Research on geometric parameter measurement method using laser tracker in null lens asphere testing[J]. Chinese J Lasers, 2015, 42(5): 0508007.

熊玲, 罗霄, 刘振宇, 郑立功, 张峰, 张学军. 2 m 量级SiC 非球面反射镜的摆臂轮廓检测[J]. 光学学报, 2015, 35(12): 1212002. Xiong Ling, Luo Xiao, Liu Zhenyu, Zheng Ligong, Zhang Feng, Zhang Xuejun. Measurement of 2 m SiC Asphere Mirror Based on Swing Arm Profilometer[J]. Acta Optica Sinica, 2015, 35(12): 1212002.

2 m 量级SiC 非球面反射镜的摆臂轮廓检测

关于本站 Cookie 的使用提示

全站搜索

2 m 量级SiC 非球面反射镜的摆臂轮廓检测

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索