BaTiO<sub>3</sub>晶体薄膜PLD法生长工艺参量研究

采用脉冲激光沉积方法在单晶MgO基片上外延生长了BaTiO₃晶体薄膜.为改善薄膜的结晶质量和表面粗糙度, 研究并优化了生长工艺中生长温度和激光能量两个参量, 并对薄膜样片实行原位退火.找到了BaTiO3薄膜在优先方向上的结晶效果, 分析了结晶质量对生长温度的依赖关系和不同激光能量对结晶薄膜的表面粗糙度的影响.利用X射线衍射仪测定结晶效果与特性, 原子力显微镜表征BaTiO3薄膜的结晶表面形貌与粗糙度.测试结果表明, 在c轴取向生长BaTiO3薄膜, 在（001）和（002）方向上都出现强度很高的尖锐衍射峰, 具有较好的结晶质量和较小的表面粗糙度, 原子力显微镜测定出薄膜的表面粗糙度为0.563 nm.

Abstract

BaTiO3 (BTO) waveguide thin films were prepared by pulsed laser deposition (PLD) on single crystal MgO substrate. In order to improve the crystalline quality and surface roughness, two process parameters of growth temperature and laser energy were studied and optimized, and the film sample was conducted in-situ annealing. The crystallization effect of BTO thin film was found in the first direction. The dependent relations of quality characteristics and growth temperature were analyzed, and the effects of different laser energy on the crystalline film surface roughness were studied. The crystallization effect and characteristic of the film were characterized by X-ray diffraction. The surface morphology and roughness were detected by atomic force microscopy. The results indicate that BTO film could be c-axial oriented film. High strength sharp diffraction peak appeared in the direction of (001) and (002). The film has good crystal quality and small surface roughness of 0.563 nm.

参考文献

[1] HUANG G, BERGER S. Combined effect of thickness and stress on ferroelectric behavior of thin BaTiO3 films［J］. Apply Physics, 2003, 93(5): 2855-2860.

[2] 钟迪生. 真空镀膜—光学材料的选择与应用［M］. 沈阳: 辽宁大学出版社, 2001: 235-241.

[3] 唐晋发, 顾培夫, 刘旭等. 现代光学薄膜技术［M］. 浙江: 浙江大学出版社, 2006: 114-118.

[4] LIN W, TSENG T. Growth and ferroelectricity of epitaxial-like BaTiO3 films on single-crystal MgO, SrTiO3 and silicon substrates synthesized by pulsed laser deposition［J］ . Apply Physics, 2002, 77(12): 6466-6469.

[5] 魏贤华, 黄文, 接文静, 等. BaTiO3铁电薄膜在硅基片上的取向生长［J］. 硅酸盐学报, 2007, 35(5): 583-587.

WEI Xian-hua, HUANG Wen, JIE Wen-jing, et al. Oriented growth of BaTiO3 ferroelectric thin film on Si substrate［J］. Journal of Silicate, 2007, 35(5): 583-587.

[6] 杨晓东, 张景文, 毕臻, 等. ZnO的激光分子束外延法制备及X射线研究［J］. 光子学报, 2008, 37(3): 485-489.

YANG Xiao-dong, ZHANG Jing-wen, BI Zhen, et al. XRD analysis ZnO frown by laser molecular beam epitaxy［J］. Acta Photonica Sinica, 2008, 37(3): 485-489.

[7] 童杏林, 郑启光, 于本海, 等. 脉冲激光沉积GaN薄膜的结构和光学特性研究［J］. 光子学报, 2003, 32(12): 1506-1509.

TONG Xing-lin, ZHENG Qi-guang, YU Ben-hai, et al. Optical and structural properties of GaN films grown on Si substrate by excimer pulsed laser deposition［J］. Acta Photonica Sinica, 2003, 32(12): 1506-1509.

[8] SUN D, LIU Z, HUANG Y, et al. Performance simulation for ferroelectric thin-film based waveguide electro-optic modulators［J］. Optical Communication, 2005, 255(7): 319-330.

[9] 童杏林, 姜德生, 刘恋, 等. 脉冲激光沉积PMN-PT薄膜极其性能研究［J］. 光子学报, 2008, 37(3): 494-497.

TONG Xing-lin, JIANG De-sheng, LIU lian, et al. Characterization of PMN-PT thin film formed by femtosecond pulsed laser deposition［J］. Acta Photonica Sinica, 2008, 37(3): 494-497.

[10] 姜斌, 蒋书文, 李燕, 等. 激光分子束外延BaTiO3/SrTiO3超晶格的晶格应变研究［J］. 真空科学与技术学报, 2005, 25(3): 196-199.

JIANG Bin, JIANG Shu-wen, LI Yan, et al. Lattice strains in BaTiO3/SrTiO3 superlattice prepared with laser molecular epitaxy［J］. Journal of Vacuum Science and Technology, 2005, 25(3): 196-199.

[11] SHENG H, JIN K. Effect of oxygen vacancy on the dielectric relaxation of BaTiO3thin films in a quenched State［J］. Apply Physics, 2012, 111(6): 104-109.

[12] 左伟华, 王华, 任明放等. 退火温度对硅基铁电薄Bi4Ti3O12晶相结构的影响［J］. 信息记录材料, 2007, 8(1): 51-54.

ZUO Wei-hua, WANG Hua, REN Ming-fang, et al. Effects of anneal temperature to Bi4Ti3O12 film on p-Si substrate［J］. Information Recording Materials, 2007, 8(1): 51-54.

[13] 接文静, 张鹰. 生长温度对单晶衬底上生长Ba(Zr0.2Ti0.8)O3 薄膜微结构和介电性能的影响［J］. 硅酸盐学报, 2009, 37(8): 1424-1428.

JEI Wen-jing, ZHANG Ying. Influence of growth temperature on the microstructure and dielectric properties of Ba(Zr0.2 Ti0.8)O3 thin film on single crystal oxide substrates［J］. Journal of Silicate, 2009, 37(8): 1424-1428.

[14] 苏雪琼, 王丽, 陈江博等. 不同衬底温度下PLD法制备的氧化锌薄膜的特性［J］. 光子学报, 2010, 39(24): 296-300.

SU Xue-qiong, WANG Li, CHEN Jiang-bo, et al. Properties of ZnO thin films with effect of substrate temperature by PLD［J］. Acta Photonica Sinica, 2010, 39(24): 296-300.

[15] 邱旸, 熊杰, 陶伯万. MgO单晶基片上YBCO高温超导薄膜的制备［J］. 超导技术, 2007, 35(2): 110-113.

QIU Yang, XIONG Jie, TAO Bo-wan. Preparation of YBCO high temperature superconductor films on MgO substrates［J］. Superconducting Technology, 2007, 35(2): 110-113.

张静, 付秀华, 杨飞, 杨彬, 孙德贵. BaTiO₃晶体薄膜PLD法生长工艺参量研究[J]. 光子学报, 2014, 43(5): 0531002. ZHANG Jing, FU Xiu-hua, YANG Fei, YANG Bin, SUN De-gui. Growth Process Parameters of BaTiO3 Crystal Thin Film in PLD Method[J]. ACTA PHOTONICA SINICA, 2014, 43(5): 0531002.

BaTiO₃晶体薄膜PLD法生长工艺参量研究

关于本站 Cookie 的使用提示

全站搜索

BaTiO3晶体薄膜PLD法生长工艺参量研究

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索

BaTiO₃晶体薄膜PLD法生长工艺参量研究