杠杆式尺蠖压电直线驱动器

设计了一种基于尺蠖运动原理的压电直线驱动器, 用于解决光学领域中的精密定位问题。该驱动器采用了对称杠杆式位移放大机构, 在保证钳紧力的同时, 可以获得较大的驱动位移。阐述了尺蠖式压电驱动器的工作原理, 对杠杆式柔性放大机构的位移损失、压电陶瓷与柔性机构的耦合特性及箝位机构与中间驱动机构的刚度进行了分析。利用有限元软件Ansys对钳位机构和驱动机构的变形、应力、输出位移和固有频率等参数进行了仿真分析。最后, 搭建了实验平台, 测试了驱动器的各项性能。测试结果显示, 该驱动器的行程为±25 mm, 钳紧力为17 N, 承载力为11 N, 最大和最小步距分别为55 μm和60 nm。当驱动电压为150 V时, 驱动器的最高驱动速度为1.259 mm/s。得到的性能指标满足光学领域精密定位需要。

Abstract

A linear lever-type piezoelectric inchworm actuator is designed to implement the high precision positioning of optical field. The actuator adopts the displacement amplification mechanism of symmetric lever, which offers enough clamping force while obtains a larger driving displacement. The working principle of piezoelectric inchworm actuator is presented. And the displacement loss of the flexible amplification mechanism, the coupling characteristics between piezoelectric ceramics and flexible mechanism, and the stiffness and driving mechanism of the clamping mechanism are analyzed. The finite element method is used to simulate the clamping mechanism and the driving mechanism, then the deformation, stress, output displacement and natural frequency are all analyzed. An experimental platform is set up to test the performance of the actuator. The results on the actuator are shown that the travel range, clamping force and the bearing capacity for the actuator are 25 mm, 17 N, and 11 N, respectively. Moreover, the maximum step is 55 μm, and the minimum step is 60 nm, respectively. By applying a driving voltage of 150 V, it offers the highest driving speed of 1.259 mm/s. these data meet the demands of the precision positioning in the optical field.

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马立, 肖金涛, 周莎莎, 孙立宁. 杠杆式尺蠖压电直线驱动器[J]. 光学精密工程, 2015, 23(1): 184. MA Li, XIAO Jin-tao, ZHOU Sha-sha, SUN Li-ning. Linear lever-type piezoelectric inchworm actuator[J]. Optics and Precision Engineering, 2015, 23(1): 184.

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