光学元件亚表面缺陷的全内反射显微检测
邓燕, 许乔, 柴立群, 徐建程, 石琦凯, 罗晋. 光学元件亚表面缺陷的全内反射显微检测[J]. 强激光与粒子束, 2009, 21(6): 835.
Deng Yan, Xu Qiao, Chai Liqun, Xu Jiancheng, Shi Qikai, Luo Jin. Total internal reflection microscopy:a subsurface defects identification technique in optically transparent components[J]. High Power Laser and Particle Beams, 2009, 21(6): 835.
[1] Feit M D,Rubenchik A M.Influence of subsurface cracks on laser induced surface damage[C]// Proc of SPIE.2003,5273:264-272.
[2] Camp D,Kozlowski W M R,Sheehan L M,et al.Subsurface damage and polishing compound affect the 355-nm laser damage threshold of fused silica surfaces[C]// Proc of SPIE.1998,3244:356-364.
[3] Kamimura T,Akamatsu S,Yamamoto M,et al.Enhancement of surface-damage resistance by removing a subsurface damage in fused silica[C]//Proc of SPIE.2004,5273:244-249.
[5] Joseph A M,Pete J D,William A S,et al.MRF applications:measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique[C]//Proc of SPIE.2005:599103.
[6] Draheim F,Harnisch B,Weigel T.Sub surface damage of optical components and the influence on scattering properties[C]//Proc of SPIE.1994,2210:709-720.
[7] Christian F K,Kenneth C J.Subsurface damage identification in optically transparent materials using a nondestructive method[J].Appl Opt,1994,33(19):4248-4253.
[8] Zhi M L,Simon J C,John R T.Total internal reflection microscopy(TIRM) as a nondestructive subsurface damage assessment tool[C]//Proc of SPIE.1995,2428:43-53.
[9] Temple P A.Total internal reflection microscopy:a surface inspection technique[J].Appl Opt,1981,20(15):2656-2661.
[10] Jabr S N.Total internal reflection microscopy:inspection of surfaces of high bulk scatter materials[J].Appl Opt,1985,24(11):1689-1692.
[11] Lynn M S,Mark K,David W C.Application of total internal reflection microscopy for laser damage studies on fused silica[C]//Proc of SPIE.1998,3244:282-295
邓燕, 许乔, 柴立群, 徐建程, 石琦凯, 罗晋. 光学元件亚表面缺陷的全内反射显微检测[J]. 强激光与粒子束, 2009, 21(6): 835. Deng Yan, Xu Qiao, Chai Liqun, Xu Jiancheng, Shi Qikai, Luo Jin. Total internal reflection microscopy:a subsurface defects identification technique in optically transparent components[J]. High Power Laser and Particle Beams, 2009, 21(6): 835.