强激光与粒子束, 2009, 21 (6): 835, 网络出版: 2009-11-24   

光学元件亚表面缺陷的全内反射显微检测

Total internal reflection microscopy:a subsurface defects identification technique in optically transparent components
作者单位
成都精密光学工程研究中心,成都 610041
摘要
光学元件亚表面缺陷的有效检测已成为高阈值抗激光损伤光学元件制造的迫切要求。基于全内反射照明原理开展了全内反射显微技术检测光学元件亚表面缺陷的实验研究。结果表明:全内反射显微技术可有效检测光学元件亚表面缺陷;入射光偏振态和入射角度会影响元件内界面下不同深度处驻波形式照明强度的分布,对于可见度发生明显改变的微小缺陷点能衡量出其一定的深度尺寸范围;利用显微镜精密调焦对界面下一定深度处缺陷成像,可知缺陷点的位置深度。
Abstract
Available test technique for the subsurface defects to be applied in optical process has become an urgent requirement of the manufacture of optics with high resistance to damage.Based on theory of total internal reflection illumination,the research on total internal reflection microscopy(TIRM) technique is done experimentally.It is proved that the TIRM technique for the detection of the subsurface defects is valid,the transformation of the polarization or the incident angle will affect the illumination distribution below the interface,hence the change in visibility of the tiny defects can be used to evaluate the size of the defects in the depth direction.The depth of the subsurface defects can also be gained according to the focusing distance of the microscopy from the interface to the defects.
参考文献

[1] Feit M D,Rubenchik A M.Influence of subsurface cracks on laser induced surface damage[C]// Proc of SPIE.2003,5273:264-272.

[2] Camp D,Kozlowski W M R,Sheehan L M,et al.Subsurface damage and polishing compound affect the 355-nm laser damage threshold of fused silica surfaces[C]// Proc of SPIE.1998,3244:356-364.

[3] Kamimura T,Akamatsu S,Yamamoto M,et al.Enhancement of surface-damage resistance by removing a subsurface damage in fused silica[C]//Proc of SPIE.2004,5273:244-249.

[4] 田东斌,祖小涛,袁晓东,等.熔石英亚表面划痕激光诱导损伤阈值实验研究[J].强激光与粒子束,2007,19(9):1547-1550.(Tian Dongbin,Zu Xiaotao,Yuan Xiaodong,et al.Experiment of laser induced damage threshold for different sub-surface cracks on fused silica.High Power Laser and Particle Beams,2007,19(9):1547-1550)

[5] Joseph A M,Pete J D,William A S,et al.MRF applications:measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique[C]//Proc of SPIE.2005:599103.

[6] Draheim F,Harnisch B,Weigel T.Sub surface damage of optical components and the influence on scattering properties[C]//Proc of SPIE.1994,2210:709-720.

[7] Christian F K,Kenneth C J.Subsurface damage identification in optically transparent materials using a nondestructive method[J].Appl Opt,1994,33(19):4248-4253.

[8] Zhi M L,Simon J C,John R T.Total internal reflection microscopy(TIRM) as a nondestructive subsurface damage assessment tool[C]//Proc of SPIE.1995,2428:43-53.

[9] Temple P A.Total internal reflection microscopy:a surface inspection technique[J].Appl Opt,1981,20(15):2656-2661.

[10] Jabr S N.Total internal reflection microscopy:inspection of surfaces of high bulk scatter materials[J].Appl Opt,1985,24(11):1689-1692.

[11] Lynn M S,Mark K,David W C.Application of total internal reflection microscopy for laser damage studies on fused silica[C]//Proc of SPIE.1998,3244:282-295

邓燕, 许乔, 柴立群, 徐建程, 石琦凯, 罗晋. 光学元件亚表面缺陷的全内反射显微检测[J]. 强激光与粒子束, 2009, 21(6): 835. Deng Yan, Xu Qiao, Chai Liqun, Xu Jiancheng, Shi Qikai, Luo Jin. Total internal reflection microscopy:a subsurface defects identification technique in optically transparent components[J]. High Power Laser and Particle Beams, 2009, 21(6): 835.

本文已被 10 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!