中国激光, 1997, 24 (8): 760, 网络出版: 2006-10-31
准分子激光化学反应淀积硫化物薄膜
Deposition of Sulphide Films by Excimer laser Photochemical Reaction
摘要
提出了一种新的激光光化学三元反应体系,用于制备硫化铅薄膜。应用吸收光谱、扫描电镜和Ｘ射线光电子能谱等测试手段研究了膜的性质和组成,指出了该方法淀积硫化物薄膜的可行性。
Abstract
In this paper, we proposed a new laser photochemical ternary reactive system for preparing the PbS thin film. The composition and property of the deposited film were investigated by different techniques (absorption spectroscopy, scanning electron microscopy, X ray photoelectron spectroscopy, etc.). We have demonstrated the possibility of depositing sulphide films by this method.
席明霞, 武四新, 郑隽, 吴正亮, 李缙, 赵国珍, 曹基文. 准分子激光化学反应淀积硫化物薄膜[J]. 中国激光, 1997, 24(8): 760. 席明霞, 武四新, 郑隽, 吴正亮, 李缙, 赵国珍, 曹基文. Deposition of Sulphide Films by Excimer laser Photochemical Reaction[J]. Chinese Journal of Lasers, 1997, 24(8): 760.
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