中国激光, 1997, 24 (8): 760, 网络出版: 2006-10-31  

准分子激光化学反应淀积硫化物薄膜

Deposition of Sulphide Films by Excimer laser Photochemical Reaction
作者单位
1 中国科学院上海光机所, 上海 201800
2 机械工业部上海材料研究所, 上海 200437
摘要
提出了一种新的激光光化学三元反应体系,用于制备硫化铅薄膜。应用吸收光谱、扫描电镜和X射线光电子能谱等测试手段研究了膜的性质和组成,指出了该方法淀积硫化物薄膜的可行性。
Abstract
In this paper, we proposed a new laser photochemical ternary reactive system for preparing the PbS thin film. The composition and property of the deposited film were investigated by different techniques (absorption spectroscopy, scanning electron microscopy, X ray photoelectron spectroscopy, etc.). We have demonstrated the possibility of depositing sulphide films by this method.
参考文献

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席明霞, 武四新, 郑隽, 吴正亮, 李缙, 赵国珍, 曹基文. 准分子激光化学反应淀积硫化物薄膜[J]. 中国激光, 1997, 24(8): 760. 席明霞, 武四新, 郑隽, 吴正亮, 李缙, 赵国珍, 曹基文. Deposition of Sulphide Films by Excimer laser Photochemical Reaction[J]. Chinese Journal of Lasers, 1997, 24(8): 760.

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