光谱学与光谱分析, 2010, 30 (12): 3179, 网络出版: 2011-01-26
磁控溅射沉积薄膜实验参数优化光谱诊断
Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering
基本信息
| DOI: | -- |
| 中图分类号: | O657 |
| 栏目: | |
| 项目基金: | 河北省自然科学基金项目(A2008000565)资助 |
| 收稿日期: | 2010-02-26 |
| 修改稿日期: | 2010-05-28 |
| 网络出版日期: | 2011-01-26 |
| 通讯作者: | 郭庆林 (qlguo@hbu.edu.cn) |
| 备注: | -- |
郭庆林, 崔永亮, 陈剑辉, 张金平, 怀素芳, 刘保亭, 陈金忠. 磁控溅射沉积薄膜实验参数优化光谱诊断[J]. 光谱学与光谱分析, 2010, 30(12): 3179. GUO Qing-lin, CUI Yong-liang, CHEN Jian-hui, ZHANG Jin-ping, HUAI Su-fang, LIU Bao-ting, CHEN Jin-zhong. Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2010, 30(12): 3179.
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