磁控溅射沉积薄膜实验参数优化光谱诊断
郭庆林, 崔永亮, 陈剑辉, 张金平, 怀素芳, 刘保亭, 陈金忠. 磁控溅射沉积薄膜实验参数优化光谱诊断[J]. 光谱学与光谱分析, 2010, 30(12): 3179.
GUO Qing-lin, CUI Yong-liang, CHEN Jian-hui, ZHANG Jin-ping, HUAI Su-fang, LIU Bao-ting, CHEN Jin-zhong. Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2010, 30(12): 3179.
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郭庆林, 崔永亮, 陈剑辉, 张金平, 怀素芳, 刘保亭, 陈金忠. 磁控溅射沉积薄膜实验参数优化光谱诊断[J]. 光谱学与光谱分析, 2010, 30(12): 3179. GUO Qing-lin, CUI Yong-liang, CHEN Jian-hui, ZHANG Jin-ping, HUAI Su-fang, LIU Bao-ting, CHEN Jin-zhong. Spectrum Diagnostics for Optimization of Experimental Parameters in Thin Films Deposited by Magnetron Sputtering[J]. Spectroscopy and Spectral Analysis, 2010, 30(12): 3179.
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