沉积参量及时效时间对SiO2薄膜残余应力的影响
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邵淑英, 田光磊, 范正修, 邵建达. 沉积参量及时效时间对SiO2薄膜残余应力的影响[J]. 光学学报, 2005, 25(1): 126. 邵淑英, 田光磊, 范正修, 邵建达. Influences of the Deposition Parameters and Aging Time on the Residual Stress of SiO2 Films[J]. Acta Optica Sinica, 2005, 25(1): 126.
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