脉冲激光沉积法沉积类金刚石薄膜的实验研究

为了研究脉冲激光沉积法中衬底温度和距离对类金刚石薄膜的影响,首先温度保持在200C, 靶和衬底间的距离分别取25.0 mm和30.0 mm来沉积类金刚石膜。其次温度保持在400C, 距离分别取25.0 mm和30.0 mm来沉积类金刚石膜。用Raman光谱仪对薄膜的微观结构进行检测,用原子力显微镜对薄膜的表面形貌进行检测。实验结果表明:距离增加或者温度升高都会导致类金刚石薄膜的密度和sp3/sp2的比值减小,薄膜中石墨晶粒的数量增多和体积增大。近距离时温度的变化和低温时距离的变化对薄膜微观结构产生的影响更明显。距离和温度的变化对类金刚石薄膜的表面形貌也产生显著的影响。

Abstract

In order to investigate influence of the substrate temperature and distance on diamond-like carbon (DLC) films in the pulsed laser deposition (PLD), firstly the temperature was kept at 200C to deposit DLC film when the graphite target located at 25.0 mm and 30.0 mm from substrate respectively, secondly the temperature was kept at 400C to deposit DLC film when the graphite target located at 25.0 mm and 30.0 mm from substrate respectively. The microstructure of DLC films was detected by the visible Raman spectroscopy. The topography of DLC films was detected by the atomic force microscopy (AFM). The experimental result demonstrates that ratio of sp3/sp2 and the density of DLC film decrease and size and number of graphitic crystallites increase when the temperature or distance increases. The smaller is the distance, the bigger is the influence of temperature on the microstructure of DLC film. The lower is the temperature, the bigger is the influence of the distance on the microstructure. The distance and temperature should influence topography of DLC film obviously.

参考文献

[1] Robertson J. Diamond-like amorphous carbon ［J］. Materials Science and Engineering R, 2002, 37(4-6): 129-281.

[2] Kwok S C H, Ha P C T, McKenzie D R, et al. Biocompatibility of calcium and phosphorus doped diamond-like carbon thin films synthesized by plasma immersion ion implantation and deposition ［J］. Diamond & Related Materials, 2006, 15(4-8): 893-897.

[3] Luo Le, Xia Tianrong, Fang Xiaodong, et al. Experiment of diamond-like carbon film deposited by pulsed laser and cell compatibility of diamond-like carbon film ［J］. Chinese Journal of Lasers (中国激光), 2009, 3(10): 2625-2628 (in Chinese).

[4] Ali N, Kousar Y, Okpalugo T I, et al. Human micro-vascular endothelial cell seeding on Cr-DLC thin films for mechanical heart valve applications ［J］. Thin Solid Films, 2006, 515(1): 59-65.

[5] Akira Mochizuki, Tatsuhisa Ogawa, Keishi Okamoto, et al. Blood compatibility of gas plasma-treated diamond-like carbon surface-effect of physicochemical properties of DLC surface on blood compatibility ［J］. Materials Science and Engineering C, 2011, 31(3): 567-573.

[6] Zhang Jiming, Liao Yuan, Zhang Wutang, et al. Growth and properties of ZnO film on CVD diamond film by pulsed laser deposition ［J］. Chinese Journal of Quantum Electronics (量子电子学报), 2008, 25(2): 240-245 (in Chinese).

[7] Narayan R J. Pulsed laser deposition of functionally gradient diamond like carbon-metal nanocomposites ［J］. Diamond & Related Materials, 2005, 14(8): 1319-1330.

[8] Ossi P M, Bottani C E, Miotello A. Pulsed-laser deposition of carbon: from DLC to cluster-assembled films ［J］. Thin Solid Films, 2005, 482(1-2): 2-8.

[9] Koh A T T, Hsieh J, Chua Daniel H C. Structural characterization of dual-metal containing diamond-like carbon nanocomposite films by pulsed laser deposition ［J］. Diamond & Related Materials, 2010, 19(5-6): 637-642.

[10] Tao Ruhua, Zhang Yuliang, et al. Laser-induced thermoelectric voltage effect of Sr2 FeMoO6 film ［J］. Chinese Journal of Quantum Electronics (量子电子学报), 2010, 27(3): 351-355 (in Chinese).

[11] Logothetidis S, Gioti M, et al. Haemocompatibility studies on carbon-based thin films by ellipsometry ［J］. Thin Solid Films, 2005, 482: 126-132.

[12] Irmer G, Dorner-Reisel A. Micro-Raman studies on DLC coatings ［J］. Advanced Engineering Materials, 2005, 7(8): 694-705.

罗乐, 赵读亮, 储雅琼, 汪毅, 马跃, 陶汝华. 脉冲激光沉积法沉积类金刚石薄膜的实验研究[J]. 量子电子学报, 2012, 29(6): 759. LUO Le, ZHAO Du-liang, CHU Ya-qiong, WANG Yi, MA Yue, TAO Ru-hua. Experimental investigation of diamond-like carbon films deposited by pulsed laser deposition[J]. Chinese Journal of Quantum Electronics, 2012, 29(6): 759.

脉冲激光沉积法沉积类金刚石薄膜的实验研究

关于本站 Cookie 的使用提示

全站搜索

脉冲激光沉积法沉积类金刚石薄膜的实验研究

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索