OLD诊断SiH4的LPCVD动力学过程
傅广生, 李晓苇, 韩理, 张连水, 董丽芳, 吕福润, 薛春银. OLD诊断SiH4的LPCVD动力学过程[J]. 中国激光, 1987, 14(11): 671.
Fu Guangsheng, Li Xiaowei, Han Li, Zhang Lianshui, Dong Lifang, Lu Furun, Xue Chunyin. Diagnosis of kinetic process in silane LPCVD by means of OLD[J]. Chinese Journal of Lasers, 1987, 14(11): 671.
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傅广生, 李晓苇, 韩理, 张连水, 董丽芳, 吕福润, 薛春银. OLD诊断SiH4的LPCVD动力学过程[J]. 中国激光, 1987, 14(11): 671. Fu Guangsheng, Li Xiaowei, Han Li, Zhang Lianshui, Dong Lifang, Lu Furun, Xue Chunyin. Diagnosis of kinetic process in silane LPCVD by means of OLD[J]. Chinese Journal of Lasers, 1987, 14(11): 671.