中国激光, 1987, 14 (11): 671, 网络出版: 2012-08-10
OLD诊断SiH4的LPCVD动力学过程
Diagnosis of kinetic process in silane LPCVD by means of OLD
补充材料
傅广生, 李晓苇, 韩理, 张连水, 董丽芳, 吕福润, 薛春银. OLD诊断SiH4的LPCVD动力学过程[J]. 中国激光, 1987, 14(11): 671. Fu Guangsheng, Li Xiaowei, Han Li, Zhang Lianshui, Dong Lifang, Lu Furun, Xue Chunyin. Diagnosis of kinetic process in silane LPCVD by means of OLD[J]. Chinese Journal of Lasers, 1987, 14(11): 671.